Edwards STP Series Instruction Manual
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Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual

Turbomolecular pumps
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-XA2703BV155/XA3203BV155
Pump Specific Information
Model name
STP-XA2703BV155/XA3203BV155
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Instruction Manual (D):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-66E-0A1-E
2023.08

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Summary of Contents for Edwards STP Series

  • Page 1 STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information (This Instruction Manual) Instruction Manual (C): STP control unit Instruction Manual Instruction Manual (D): STC-U eTMS unit for Turbomolecular Pump 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 Declaration of Conformity This declaration of conformity is issued under the sole responsibility of the manufacturer: Edwards Japan Limited Documentation Officer 1078-1,Yoshihashi, Jana Sigmunda 300 Yachiyo-shi Lutín , 78349 Chiba, 276-8523 Czech Republic Japan T: +42(0) 580 582 728 documentation@edwardsvacuum.com...
  • Page 3 -Oct-2022 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Martin Tollner Petr Tochacek President, Semiconductor Chamber Solutions...
  • Page 4 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: • 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight • 6(c) Copper alloy containing up to 4% lead by weight •...
  • Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 × 〇 〇 〇 〇 〇...
  • Page 6 The description of this product consists of the four-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) • STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...

  • Page 7: Table Of Contents

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP How to install the STP pump Connecting the water cooling pipe TEMPERATURE MANAGEMENT SYSTEM (TMS) Configuration of the STP pump with the TMS...
  • Page 8 STP-XA2703BV155/XA3203BV155 Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-XA2703BV155: VG250/ISO250F/ICF305 (DN250CF) STP-XA3203BV155: VG300/ISO320F/ICF356 (DN320CF) Label affixing positions for the STP pump Prohibited matter Methods of securing the STP pump Shape of reduced diameter shank bolts Positions of the cooling water port Configuration of the TMS TABLES Table...

  • Page 9: Technical Data

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-XA2703BV155 Extreme Advanced throughput type SCU-1600/1601 * STP-XA3203BV155 Corrosion resistant type High-emissivity coating type unit Corrosion resistant: STP pump with anti-corrosive treatment. High-emissivity coating: STP pump with rotor covered with high-emissivity coating. Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the temperature with the thermistor in the turbomolecular pump, and performing the TMS heater ON/OFF control in order to maintain a constant temperature of the STP pump.

  • Page 10: Stp Pump Specifications

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item XA2703BV155 XA3203BV155 Flange size Inlet port flange VG250/ISO250F VG300/ISO320F ICF305 (DN250CF) ICF356 (DN320CF) Outlet port flange KF40 KF40 Pumping speed 2,650 3,200 2,050 2,300 Compression ratio...

  • Page 11: Condition For The Water-Cooling Unit

    Ar gas is vacuumed continuously and the backing-pump (pumping speed: 1,300 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. 1.1.2...

  • Page 12: External Appearance Of The Stp Pump

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump External appearance of the STP pump Figure 1 - STP-XA2703BV155: VG250/ISO250F/ICF305 (DN250CF) Inlet Item Description ICF305 port VG250 ISO250F Center of gravity (DN250CF) flange φA Purge port KF10 Upper water cooling port Lower water cooling port TMS sensor connector TMS heater connector Screw hole of legs 4-M16 depth 33...

  • Page 13: Stp-Xa3203Bv155: Vg300/Iso320F/Icf356 (Dn320Cf)

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Figure 2 - STP-XA3203BV155: VG300/ISO320F/ICF356 (DN320CF) Item Description Inlet ISO320F ICF356 port VG300 Center of gravity (DN320CF) flange Purge port KF10 φA 425 425 Upper water cooling port 28.5 415 429 454.5 Lower water cooling port 370 384 409.5 TMS sensor connector 339 353...

  • Page 14: Label Affixing Positions

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 4 and 8 to 12. Figure 3 - Label affixing positions for the STP pump TMS heater caution label Hot surface warning label STP pump installation warning label Heavy product caution label Name plate...

  • Page 15: Accessories

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 Clamping ring for purge port KF10 O-ring washer for purge port KF10 Instruction Manual (B) This manual MT-66E-0A1-E Page 7...
  • Page 16 STP-XA2703BV155/XA3203BV155 Turbomolecular Pump This page is intentionally blank. MT-66E-0A1-E Page 8...

  • Page 17: How To Secure The Stp Pump

    Use a material that has a tensile strength of 600 N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-66E-0A1-E Page 9...
  • Page 18 STP-XA2703BV155/XA3203BV155 Turbomolecular Pump The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in, Figure 6 is designed to absorb energy and also buffer the destructive torque. There are two installation methods for the pump, as shown in Figure 5.
  • Page 19 STP-XA2703BV155/XA3203BV155 Turbomolecular Pump CAUTION Install the flange securing bolts in the proper position with the special square washer shown in Figure 6. Failure to do so may cause abnormal operation of the torque reduction mechanism and damage the pump. CAUTION When any internal abnormality/error results in high rotational torque, causing the torque reduction mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at axis.
  • Page 20 STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Pump model STP-XA2703BV155 Flange type ISO250F VG250 Torque reduction Not Equipped Equipped (standard) Not Equipped Equipped (optional) mechanism (standard) Destructive Torque 48.1 48.1 71.2 [kNm] Base (8 positions) securing Shape Standard Standard Standard Standard Standard Standard Size This model is not Q’ty available...
  • Page 21 STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Pump model STP-XA3203BV155 Flange type ISO320F VG300/VG350 Torque reduction Not Equipped Not Equipped Equipped (optional) Equipped (optional) mechanism (standard) (standard) Destructive Torque 48.1 71.2 48.1 71.2 [kNm] Base (8 positions) securing Shape Standard Standard Standard Standard Standard Standard Standard Standard...

  • Page 22: Connecting The Water Cooling Pipe

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Connecting the water cooling pipe It is recommended to connect the water cooling pipes according to the direction (IN side / OUT side) In Figure 7. Figure 7 - Positions of the cooling water port MT-66E-0A1-E Page 14...

  • Page 23: Temperature Management System (Tms)

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. Moreover, NEVER remove the TMS cover while the Temperature Management System (TMS) unit is in operation.

  • Page 24: Tms Heater

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP pump at the factory. The overheat prevention device is set on the TMS heater. TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump.

  • Page 25: Specification Of Tms Unit

    STP-XA2703BV155/XA3203BV155 Turbomolecular Pump Specification of TMS unit Item Specification Temperature control method Control ON/OFF of the TMS heater and cooling water Input channel 1 / Output channel 1 TMS heater temperature Setting °C TMS heater voltage ACV (Hz) 220 (50/60) TMS heater capacity Display name on STC-U HEATER1...

  • Page 26: Accessories

    TMS heater cable Shielded cable with connector at each end. Standard cable length is 5 m (max. 30m). Contact TMS sensor cable Edwards for further information. TMS valve Coupling for water cooling port, cable with connector on one side TMS heater cover...
  • Page 27 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

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