Precautions For Safe Operation Of The Stp Pump; Usable Gases - Edwards STP Series Instruction Manual

1.4

Precautions for safe operation of the STP pump

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1 1.4.1

Usable gases

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1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
Introduce a dry N
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.
Cool the STP pump to prevent the STP pump from overheating when pumping gases.
MT-91E-001-0
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STP-iXA4507 series Turbomolecular Pump
Confirm the characteristics of gases to be used to prevent an accident. Refer to the
Safety Data Sheet (SDS) obtained from the gas supplier. Keep SDS and follow safety
Warn of the danger of the gas with the warning label when the use gas is hazardous
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
corrode the STP pump and damage it.
gas (purge gas) to protect the inside of the STP pump when using reactive or
2
WARNING
advice from the gas suppliers.
WARNING
chemical material.
WARNING
CAUTION
CAUTION
CAUTION