Precautions For Safe Operation Of The Stp Pump; Usable Gases; Precautions On Maintenance And Inspection - Edwards STP-L301 Series Instruction Manual

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Precautions for Safe Operation of the STP Pump

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Usable Gases

Chlorine or fluorine system gases can be used in chemical specific pumps
(STP-L301C/STP-L451C or other models). When you use gases including alkaline metals, but
excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Edwards.
◇ To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
In addition, keep MSDS and a safety advice of gas supplier.
◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
STP-L301/STP-L451 pump or other models without anti-corrosion treatment.
◇ Introduce a dry N
using reactive or corrosive gases.
◇ Cool the STP pump to prevent the STP pump from overheating when pumping
gases.
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Precautions on Maintenance and Inspection

Read through Section 11, "Troubleshooting, Maintenance and Inspection" before performing
any maintenance or inspection of the STP pump or the STP control unit (such as fuse
replacement).
◇ Always turn OFF the primary power (switch the breaker "OFF") and isolate the
electrical energy source (Lockout/Tagout) on the vacuum equipment before
performing any maintenance.
◇ NEVER touch any portions other than those designated when performing
maintenance.
Careless touch may cause electric shock and/or a short-circuiting of the internal
circuit, resulting in product damage or a problem.
STP-L301/L451 Series Instruction Manual
gas (purge gas) to protect the inside of the STP pump when
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