Operation Principle Of The Stp Pump - Edwards STP-iS1607 Series Instruction Manual

1.7

Operation principle of the STP pump

Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat
panel, solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iS1607 series pump is a magnetically-levitated turbomolecular pumps, each with the
following features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
7
1. Rotor blade
2. Stator blade
3. Radial sensor
STP-iS1607 Series Turbomolecular Pump
4. Radial electromagnet
5. Axial sensor
6. Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
1
2
3
4
3
6
5
8
7. Touch down bearing
Control unit
8.
MT-94E-001-C
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