Water Cooling Use Condition - Edwards STP-iS2207 Series Instruction Manual

2.3

Water cooling use condition

Use cooling water which fulfills the following conditions.
Port type
Flow rate
Water temperature
Water pressure
Maximum grain size
pH
Water hardness
Resistivity
Turbidity
*1
STP-iS2207 Series Turbomolecular Pump
Item
MPa (kgf/cm
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)
Specification
Rc 1/4 (Female)
L/min 3
°C 15 to 35
*1
2 ) 0.3 (3)
mm 2 0.03
6.5 to 8.0
mg/L 100
kΩ･cm
4 to 1000
FNU < 30
2
MT-89E-001-C
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