Edwards STP Series Instruction Manual
Stp series turbomolecular pumps
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Instruction Manual (A)
STP Series Turbomolecular Pumps
D
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
Instruction Manual (B):
Instruction Manual (C):
Generic Instruction Manual
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Copyright 2010 Edwards Japan Limited. All rights reserved. Printed in Japan.
Applicable Models:
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
STP-A2203 series
STP-A2503/A3003 series
STP-A2803/A3503 series
STP-F2203 series
STP-XH2603P/XH3203P series
STP-XA2703/XA3203 series
STP-XA4503 series
STP-XW3503 series
MT-00E-001-B
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Table of Contents
Related Manuals for Edwards STP Series
Summary of Contents for Edwards STP Series
- Page 1 STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual (This Instruction Manual) Instruction Manual (B): STP pump specific information Instruction Manual (C): STP control unit Instruction Manual Copyright 2010 Edwards Japan Limited. All rights reserved. Printed in Japan.
- Page 2 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 3: Table Of Contents
STP Series Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Applied standards Limited warranty 1.3.1 Warranty period 1.3.2 Item warranted 1.3.3 Disclaimer 1.3.4 Spare parts Precautions for safe operation of the STP pump 1.4.1 Usable gases Maintenance and inspection precautions... - Page 4 STP Series Turbomolecular Pump CONTENTS PAGE Section Title Page OPERATION Before starting the STP pump 4.1.1 Tuning 4.1.2 Operation of vacuum system Pump operation 4.2.1 LED indication during operation 4.2.2 Starting the STP pump after a safety function operates Gas pumping, cooling and baking the STP pump 4.3.1...
- Page 5 STP Series Turbomolecular Pump CONTENTS PAGE Section Title Page SERVICE, SPARES AND ACCESSORIES Introduction Service Spares Accessories March 10 Issue 1-b...
- Page 6 STP Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label Caution label TMS heater surface caution label Rotation instruction label Cross sectional view of the STP pump...
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Page 7: Introduction
Warning - heavy object. Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are displayed on the LCD of the STP control unit. Note that the words "WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions during the operation. -
Page 8: Applied Standards
This WARRANTY applies to the customer to whom Edwards has delivered this product. 1.3.1 Warranty period Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards. 1.3.2 Item warranted This warranty applies only to the product delivered from Edwards to the customer. -
Page 9: Disclaimer
STP Series Turbomolecular Pump 1.3.3 Disclaimer Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period: 1. Handling, operation or maintenance other than that specified herein. 2. Failure to follow any of the warnings or cautions enumerated in this manual. -
Page 10: Precautions For Safe Operation Of The Stp Pump
STP Series Turbomolecular Pump Precautions for safe operation of the STP pump 1.4.1 Usable gases Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards. • Gases including alkaline metals except Li gas. -
Page 11: Maintenance And Inspection Precautions
STP Series Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump, following Section 6, "MAINTENANCE AND INSPECTION". Labels The following labels are affixed to the STP pump. Read the contents of the labels before operation. -
Page 12: Heavy Product Caution Label
STP Series Turbomolecular Pump 3. Heavy product caution label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 2.2, "Unpacking" so as not to cause any accident during handling. -
Page 13: Tms Heater Surface Caution Label
STP Series Turbomolecular Pump 6. TMS heater caution label This label instructs operators so as not to remove the TMS heater from the STP pump. (only with TMS unit) Figure 6 - TMS heater caution label 7. Rotational direction instruction label This label describes the rotational direction of the STP pump. -
Page 14: Operation Principle Of The Stp Pump
STP Series Turbomolecular Pump Operation principle of the STP pump The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the following features: • Oil free • Low vibration • High reliability Rotor blade Axial sensor... -
Page 15: Temperature Management System
STP Series Turbomolecular Pump The STP pump (Figure 8) is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. -
Page 16: Name Of The Stp Pump
STP Series Turbomolecular Pump Name of the STP pump 1. Inlet port flange 4. Outlet port flange 2. TMS sensor connector 5. STP connector 3. Cooling water port 6. Purge port Figure 9 - Configuration of the STP pump (Typical pump model) - Page 17 STP Series Turbomolecular Pump Item Description Function Inlet port flange Connected to the vacuum equipment (at the high vacuum side). *1*2 TMS sensor connector A temperature sensor is attached for use with the TMS unit only. Cooling water port Connected to the STP pump cooling water pipe. This port is...
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Page 19: Installation Of The Stp Pump
And, take measures according to MSDS to prevent an accident caused by exhaust gas. CAUTION If the STP pump is to be used in an area with radiation, contact Edwards. CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards: •... -
Page 20: Installation Area
DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump. In addition, leave enough space to install other cables without bending them excessively. Note: The L-type STP connection cable is also offered. Contact Edwards if necessary. March 10 Issue 1-b... -
Page 21: Bench
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. March 10 Issue 1-b... -
Page 22: Unpacking
It is recommended to keep the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse. If the STP pump is damaged, return it in its original package and contact Edwards or their distributor. WARNING The STP pumps are heavy products. Observe national laws/regulations, safety standards and manufacturers instructions when lifting the STP pump. -
Page 23: Example Of Lifting The Stp Pump (Horizontal Positioning)
STP Series Turbomolecular Pump When installing the STP pump horizontally using a crane or other appropriate, support pump casing, or pump base (see Figure 11). DO NOT apply face on convex parts, such as the outlet port or connectors by ropes. Doing so may the pump to fall, or deform and damage the parts. -
Page 24: How To Install The Stp Pump
STP Series Turbomolecular Pump How to install the STP pump Install the STP pump to the vacuum equipment as shown in Figure 12. WARNING An appropriate enclosure or a barrier which cannot be removed without using a tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided. -
Page 25: Installation Of The Stp Pump To The Vacuum Equipment
STP Series Turbomolecular Pump 1. STP control unit 4. STP connection cable 7. Outlet port 8. (Vacuum valve) 2. Power cable 5. (Vacuum equipment) 9. (Backing-pump 3. TMS connection cable 6. Inlet port flange [dry pump, and other]) The STP pump can be installed through the damper (optional accessory). -
Page 26: Cleaning The Seal
STP Series Turbomolecular Pump 2.3.1 Cleaning the seal WARNING The wipes used to clean the flange of the pump might become hazardous waste depending upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government. -
Page 27: Stp Pump Installation Positions
STP Series Turbomolecular Pump 2.3.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. (Depending upon the pump model, the STP pump cannot be installed in some positions. Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B).) Vacuum equipment 4. -
Page 28: Secure The Stp Pump
STP Series Turbomolecular Pump 2.3.3 Secure the STP pump WARNING The STP pump is provided with a high-speed rotor. Any internal abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. -
Page 29: Vacuum Piping Method
STP Series Turbomolecular Pump 5. Connect the STP pump and the backing-pump using stainless steel or aluminum alloy tubing, flexible tubing, vacuum rubber or Teflon tubing, and other. The following measures can be used to avoid the transmission of the vibration of the backing-pump to the STP pump and the vacuum equipment: •... -
Page 30: Connecting The Purge Port
STP Series Turbomolecular Pump 2.3.6 Connecting the purge port When pumping reactive or corrosive gases, introduce a dry N gas or other gas into the STP pump in order to protect the inside of the STP pump. Introduce a dry N gas through the electromagnetic vent. -
Page 31: Attaching A Baking Heater
STP Series Turbomolecular Pump 2.3.8 Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION Check the rated voltage of the baking heater before use. The range of the available voltage of the backing heater (optional accessory) is display voltage ±10 %. - Page 32 STP Series Turbomolecular Pump This page intentionally blank March 10 Issue 1-b...
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Page 33: Installation Of The Stp Control Unit
STP Series Turbomolecular Pump INSTALLATION OF THE STP CONTROL UNIT This section is extracted from the STP Control Unit Instruction Manual (C). The Applicable control unit differs depending upon the STP pump model. Refer to “TECHNICAL DATA” in the STP Pump Instruction Manual (B). -
Page 34: Scu-750
STP Series Turbomolecular Pump 3.1.2 SCU-750 <-A X5 TMS STP CONTROL UNIT REMOTE POWER FAILURE TEMP CTRL RESET SELECT NORMAL ACCEL BRAKE ON.I DOWN START ENTER STOP OFF.O MAIN POWER X2 AC POWER AC100-120V 8A～*/200-240V 6A～ *Applicable only for specific model... -
Page 35: Scu-1500
STP Series Turbomolecular Pump 3.1.4 SCU-1500 ON.I X 3 B X 3 A O F F OFF.0 M AI N PO WE R STP CONTROL UNIT REMOTE POWER FAILURE X4 MOTOR TEMP CTRL RESET SELECT NORMAL X8 STP-LINK BRAKE ACCEL... -
Page 36: Cable Connection
STP Series Turbomolecular Pump Cable connection Refer to the STP Control Unit Instruction Manual (C) for detailed information of the cables. 3.2.1 STP connection cable Figure 21 - SCU-750/SCU-800 STP connection cable Figure 22 - SCU-1400/SCU-1500/SCU-1600 STP connection cable March 10... -
Page 37: Power Cable
STP Series Turbomolecular Pump 3.2.2 Power cable Figure 23 - SCU-750 power cable Figure 24 - SCU-800 power cable Figure 25 - SCU-1400/SCU-1500/SCU-1600 power cable March 10 Issue 1-b... -
Page 38: How To Connect The Cables
CAUTION Use the STP connection cable and the power cable that Edwards has specified. The use of other cables may result in product damage. The STP connection cables and power cables differ depending upon the pump model. Refer to Section 3.2, "Cable connection"... - Page 39 STP Series Turbomolecular Pump CAUTION DO NOT apply surge voltage exceeding 1 kV to the input power line. Always ground the power cable to prevent electric shock. Support each cable so as not to apply direct force to the connectors or terminals. Connect each cable securely with caution, avoiding any obstacles as follows: 1.
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Page 41: Operation
STP Series Turbomolecular Pump OPERATION This section is an extract from the STP Control Unit Instruction Manual (C). Read the STP Control Unit Instruction Manual (C) of carefully before operating the STP pump. Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. -
Page 42: Operation Of Vacuum System
STP Series Turbomolecular Pump 4.1.2 Operation of vacuum system Starting backing-pump CAUTION DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type of the backing-pump, doing so may cause a reverse flow of oil, which could contaminate the inside of the STP pump. -
Page 43: Starting The Stp Pump After A Safety Function Operates
STP Series Turbomolecular Pump 4. When the rotational speed decreases to 500 rpm or less, the "BRAKE" LED extinguishes. The LCD displays "Levitation" (LEVITATION state). 5. When performing the start operation, the STP pump can be accelerated even while it is stopping. -
Page 44: How To Introduce A Purge Gas
STP Series Turbomolecular Pump 4.3.2 How to introduce a purge gas CAUTION When pumping reactive or corrosive gases, introduce a purge gas to protect the inside of the STP pump. Not to do so may result in product damage. Connect a needle valve or a similar part to the purge port and introduce a dry N gas or other gas to perform a gas purge (see Section 2.3.6, "Connecting the purge port"). -
Page 45: Air-Cooling Method
STP Series Turbomolecular Pump 4.4.2 Air-cooling method When water-cooling is not available, use an air-cooling unit (optional accessory). Refer to the STP Pump Instruction Manual (B) for installation and other details. Note: The air-cooling unit is not available depending on the STP pump model. Refer to the STP Pump Instruction Manual (B) and confirm whether the air-cooling unit can be used for the STP pump. -
Page 46: How To Use The Tms Unit
STP Series Turbomolecular Pump How to use the TMS unit See the STP Pump Instruction Manual (B) for the installation method of the TMS unit. 4.6.1 Parameter set mode Before operating the TMS unit, set the "TMS Function" to "ENABLE". Setting can be performed in Parameter Set Mode. -
Page 47: Safety Functions
STP Series Turbomolecular Pump SAFETY FUNCTIONS The STP pump is provided with safety functions for various abnormalities/errors. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures. If you cannot trace it or if the STP pump does not function normally after the troubleshooting in the STP Control Unit Instruction Manual (C), contact Service office. -
Page 48: Abnormal State Of Magnetic Bearing
STP Series Turbomolecular Pump 5.1.3 Abnormal state of magnetic bearing CAUTION When an abnormality/error occurs in the magnetic bearing, check the STP pump as well as the STP control unit. If "FAILURE" cannot be released after reset operation, contact Service office. -
Page 49: Overheating Inside The Stp Control Unit
STP Series Turbomolecular Pump 5.1.7 Overheating inside the STP control unit The temperature in the STP control unit increases when the ventilating duct is blocked or the ambient temperature is high. The LCD displays error message "CAUTION: CNT heat*" when the inside of the STP control unit overheats. - Page 50 STP Series Turbomolecular Pump This page intentionally blank March 10 Issue 1-b...
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Page 51: Maintenance And Inspection
NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipments before performing maintenance and inspections. Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact Service office. -
Page 52: Cleaning
Contact with the atmosphere may cause a reaction of the deposit. DO NOT open the STP pump to the atmosphere. Edwards can supply a Temperature Management System (TMS) unit which will keep the temperature high inside the STP pump and prevent the accumulation of deposit. For details, contact Edwards. March 10 Issue 1-b... -
Page 53: Overhaul
STP Series Turbomolecular Pump Overhaul Deterioration or abrasion of the internal parts of the STP pump will cause a failure. The recommended maintenance intervals for different process applications are tabulated below: Process Period Remarks Metal Etch Process 1 year Processes resulting in large amount of deposits in (deposition) the pump will require more frequent service. -
Page 54: Transporting For Repair Or Overhaul
Procedure". CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes. -
Page 55: Storage And Disposal
STP Series Turbomolecular Pump Storage and disposal Storage of the STP pump When planning not to use the STP pump over a long period (more than a few months), follow the precautions below: 1. Store the STP pump in a vertical position. -
Page 56: Disposal
Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. March 10 Issue 1-b... -
Page 57: Service, Spares And Accessories
A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: •... -
Page 58: Accessories
STP Series Turbomolecular Pump Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual (A) Generic Instruction Manual This manual Instruction Manual (B) Pump Specific Information Instruction Manual (C) - Page 59 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2010 Edwards Japan Limited. All rights reserved.