Installation; Operating Environment; Preparation For Stp Pump; Installation For The Water Cooling Unit - Edwards STP Series Instruction Manual

Turbomolecular pumps
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3

Installation

Read the "STP pump Instruction Manual" for the installation
of the STP pump and STP control unit.
3.1

Operating Environment

Install the TMS unit in a place meeting the following requirements:
Ambient temperature
Ambient relative humidity
Other
3.2

Preparation for STP Pump

3.2.1

Installation for the Water Cooling Unit

1)
Unpack the supplied water cooling unit. (See Figure 3.1)
2)
Attach the water cooling unit using 4 screws at screw holes for legs. (8-M8, depth 16
mm)
TMS Unit INSTRUCTION MANUAL for STP-301CVB3
0 to 40 °C
30 to 95 % (no dew condensing)
Install a place meeting required environment for the
STP pump and STP control unit.

Figure 3.1 Installation for the Water Cooling Unit

3-1

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Stp-301cvb3

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