Cleaning The Seal - Edwards STP-L301 Series Instruction Manual

STP-L301/L451 Series Instruction Manual
4.3.1

Cleaning the Seal

Inspect the seals of the inlet and outlet port flanges for dirt or oil spots before installing the
STP pump to the vacuum equipment.
Take the following measures for cleaning the seals:
Clean off with a pure gas.
Wipe with proper solvent (such as alcohol).
◇ A splinter shield is attached to the inlet port flange to prevent foreign particles from
falling into the STP pump.
Always leave the splinter shield attached during operation.
◇ The wipes used for clean the flange of the pump might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
◇ The splinter shield cannot perfectly prevent foreign particles from falling into the
STP pump.
DO NOT install the STP pump in such a manner that foreign particles can easily fall
into it (for example, Si wafers or samples are positioned above the STP pump). If
installing the STP pump in such a manner, always attach a shield plate with
sufficient conductance above the STP pump to prevent foreign particles from falling
into it. Foreign particles falling into the STP pump through the splinter shield may
result in product damage.
◇ Be careful not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before installing the STP
pump.
4-6