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A-4
Specifications
Resistance Measurement Accuracy (4-wire sense with remote preamp)
Source I Mode, Auto Ohms
Max.
Range
Resolution
<2.00000
1 µΩ
6
Ω
20.0000
100 µΩ
Ω
200.000
1 mΩ
Ω
2.00000 kΩ
10 mΩ
20.0000 kΩ
100 mΩ
200.000 kΩ
1
Ω
2.00000 MΩ
10
Ω
20.0000 MΩ
100
Ω
200.000 MΩ
1 kΩ
2.00000 GΩ
10 kΩ
20.0000 GΩ
100 kΩ
200.000 GΩ
1 MΩ
2.00000 TΩ
10 MΩ
20.0000 TΩ
100 MΩ
>20.0000 TΩ
—
6
Resistance Measurement Accuracy (4-wire sense without remote preamp)
Source I Mode, Auto Ohms
Max.
Range
Resolution
<2.00000
1 µΩ
6
Ω
20.0000
100 µΩ
Ω
200.000
1 mΩ
Ω
2.00000 kΩ
10 mΩ
20.0000 kΩ
100 mΩ
200.000 kΩ
1
Ω
2.00000 MΩ
10
Ω
20.0000 MΩ
100
Ω
200.000 MΩ
1 kΩ
TEMPERATURE COEFFICIENT (0°–18°C & 28°–40°C): ±(0.15 × accuracy specification)/°C.
SOURCE I MODE, MANUAL OHMS: Total uncertainty = I source accuracy + V measure accuracy (4-wire sense).
SOURCE V MODE: Total uncertainty = V source accuracy + I measure accuracy (4-wire sense).
6-WIRE OHMS MODE: Available using active ohms guard and guard sense (mainframe rear panel ONLY). Max. Guard Output Current: 50 mA.
Accuracy is load dependent. Refer to manual for calculation formula.
MAINFRAME GUARD OUTPUT RESISTANCE: 0.1Ω in ohms mode.
Speed = 10 PLC, Autofilter ON, properly zeroed and settled.
1
2
Source I mode, I = 0.
Voltage measurement accuracy is not affected by the remote preamp.
3
4
Current measurement accuracy is not affected by the remote preamp; however, the 1pA through 100nA ranges are available only when using a
preamp.
4-wire mode.
5
6
Manual ohms mode only.
Source readback enabled, offset compensation ON. Source delay must be programmed such that the source is fully settled for each reading.
7
Default
Normal Accuracy (23°C ± 5°C)
Test Current
1 Year, ±(%rdg + ohms)
—
Source I
+ Measure V
ACC
100 mA
0.098% + 0.003
10 mA
0.077% + 0.03
1 mA
0.066% +
100 µA
0.063% +
10 µA
0.082% +
1 µA
0.082% +
1 µA
0.085% +
100 nA
0.085% +
10 nA
0.085% +
1 nA
0.085% +
100 pA
0.205% +
10 pA
0.822% +
1 pA
2.06%
+
—
Source I
+ Measure V
ACC
Default
Normal Accuracy (23°C ± 5°C)
Test Current
1 Year, ±(%rdg + ohms)
—
Source I
+ Measure V
ACC
100 mA
0.098% + 0.003
10 mA
0.077% + 0.03
1 mA
0.066% +
100 µA
0.063% +
10 µA
0.082% +
1 µA
0.082% +
1 µA
0.085% +
100 nA
0.085% +
Enhanced Accuracy (23°C ± 5°C)
1 Year, ±(%rdg + ohms)
Measure I
ACC
ACC
0.068% + 0.001
Ω
0.048% +
Ω
0.3
0.040% +
Ω
3
0.038% +
Ω
30
0.064% +
Ω
300
0.064% +
Ω
1 kΩ
0.067% +
10 kΩ
0.068% +
100 kΩ
0.070% +
1 MΩ
0.070% +
10 MΩ
0.185% +
100 MΩ
0.619% +
1 GΩ
1.54% +
Measure I
ACC
ACC
Enhanced Accuracy (23°C ± 5°C)
1 Year, ±(%rdg + ohms)
Measure I
ACC
ACC
0.068% + 0.001
Ω
0.048% +
Ω
0.3
0.040% +
Ω
3
0.038% +
Ω
30
0.040% +
Ω
300
0.042% +
Ω
1 kΩ
0.045% +
10 kΩ
0.349% +
7
+ Measure V
ACC
Ω
0.01
Ω
0.1
Ω
1
Ω
10
Ω
100
Ω
500
Ω
5 kΩ
50 kΩ
500 kΩ
5 MΩ
50 MΩ
500 MΩ
+ Measure V
ACC
7
+ Measure V
ACC
Ω
0.01
Ω
0.1
Ω
1
Ω
10
Ω
100
Ω
500
Ω
5 kΩ
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