Model 2635/2636 Current Measurement Accuracy 100Pa To 100Na Ranges - Keithley 2601 Reference Manual

System sourcemeter 2600 series (smu)
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Series 2600 System SourceMeter® Instruments Reference Manual

Model 2635/2636 current measurement accuracy 100pA to 100nA ranges

A suitably guarded and characterized 1 GΩ resistance standard, such as Keithley's 2600-STD-
RES is necessary for the following measurements. Step-by-step procedures and connection
diagrams for verifying the current measurement accuracy for the low current ranges are included
with the 2600-STD-RES. The general process entails forcing a characterized voltage across the
1Gohm resistor and comparing the 2636/2636 measured results against the standard resistance
and voltage derived current.
1.
Characterize the appropriate +/- V source values with the DMM according to
Table 15-9
Model 2635/2636 Characterization of Voltage Source settings
Low Current Range
100 pA
1 nA
10 nA
100 nA
2.
Characterize the desired 2635/2636 current ranges.
a.
b.
c.
d.
e.
Table 15-10
Model 2601/2602 current measurement accuracy limits
Model 2601/2602
source and
measure range
1. Measure range coupled to source range when simultaneously sourcing and measuring
current.
2. As measured by precision digital multimeter. Use closest possible value, and modify reading
limits accordingly if necessary.
2600S-901-01 Rev. C / January 2008
Voltage Source
+/- 100.00 mV
+/- 1.0000 V
+/- 10.000 V
+/- 100.00 V
Connect guarded resistance standard.
Source the appropriate voltage for +/- full scale reading.
Wait 30 seconds for stable measurement.
Capture the 2635/2636 reported current measurement.
Verify output current accuracy for each of the currents for the 100pA to 100nA ranges
listed in
Table 15-12
(Model 2635/2636).
Source
2
current
1
100nA
90.000nA
1µA
0.9000µA
10µA
9.0000µA
100µA
90.000µA
1mA
0.9000mA
10mA
9.0000mA
100mA
90.000mA
1A
0.90000A
3A
2.4000A
Return to
Model 2601/2602 current reading limits
(1 year, 18 C–28 C)
89.855 to 90.145nA
0.899475 to 0.900525µA
8.99625 to 9.00375µA
89.957 to 90.043µA
0.89962 to 0.90038mA
8.9957 to 9.0043mA
89.962 to 90.038mA
0.89823 to 0.90177A
2.3953 to 2.4047A
Section Topics
Section 15: Performance Verification
Table
Compliance
1.5 A
1.5 A
1.5 A
100 mA
15-9.
15-15

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