Keithley 2651A User Manual
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Keithley 2651A User Manual

Keithley 2651A User Manual

High power system sourcemeter instrument
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Model 2651A High Power
System SourceMeter
User's Manual
2651A-900-01 Rev. A / March 2011
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Summary of Contents for Keithley 2651A

  • Page 1 Model 2651A High Power ® System SourceMeter Instrument User’s Manual 2651A-900-01 Rev. A / March 2011...
  • Page 2 All rights reserved. Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part, without the prior written approval of Keithley Instruments, Inc. is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc.

  • Page 3: Safety Precautions

    Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages.
  • Page 4 (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

  • Page 5: Table Of Contents

    Welcome ..........................1-1 Extended warranty ....................... 1-1 Introduction to this manual....................1-1 CD-ROM contents........................ 1-2 Organization of manual sections..................1-2 Model 2651A applications ....................1-2 Using the front-panel interface.................. 2-1 Introduction .......................... 2-1 Front panel ........................... 2-1 Using the web interface....................3-1 Introduction ..........................
  • Page 6 Table of Contents Model 2651A High Power System SourceMeter® Instrument User's Manual Capturing high power pulse waveforms..............5-1 Introduction to capturing waveforms ..................5-1 Equipment needed for this example ..................5-1 Set up communication......................5-1 Device connections ......................5-2 Configuring the trigger model....................5-2 Example program code ......................
  • Page 7 Model 2651A High Power System SourceMeter® Instrument User's Manual Table of Contents The internal web page of the instrument is not accessible ..........8-1 Save the present state of the instrument ................8-2 LabVIEW driver for the Model 2651A .................. 8-2 Next steps........................

  • Page 8: Introduction

    This manual provides detailed tutorials to help you achieve success with your Keithley Instruments Model 2651A. In addition, the basics of the two simplest interfaces, the front panel and the web interface, are provided to familiarize you with the instrument. Select and run all examples in Sections 5, 6, and 7 that are relevant to your intended use and to the equipment you are using.

  • Page 9: Cd-Rom Contents

    Model 2651A High Power System SourceMeter® Instrument User's Manual CD-ROM contents Two CD-ROMs are shipped with each Model 2651A order. The Model 2651A Quick Start Guide, User's Manual, and Reference Manual are provided in PDF format on the Model 2651A Product Information CD-ROM.
  • Page 10 • Increasing SMU current sourcing ability (on page 7-1): Demonstrates how to combine two Keithley Instruments Model 2651A instruments with an additional Series 2600A System ® SourceMeter instrument, and characterizes the resistance of a power MOSFET by sweeping current up to 100 A.

  • Page 11: Using The Front-Panel Interface

    Front panel ................2-1 Introduction Before starting this section, complete the tasks outlined in the Model 2651A Quick Start Guide. Once you have completed those tasks, read this section, which provides enough basic information about the Model 2651A front-panel interface to work through the examples provided in this manual.
  • Page 12 ENTER key. (4) The OUTPUT ON/OFF control. Press this control to turn the Model 2651A source output on or off. The output indicator will light when the source is on.
  • Page 13 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 2: Using the front-panel interface Figure 2: Setup and control keys MEAS LIMIT MODE DISPLAY CURSOR AUTO DIGITS SPEED FILTER CONFIG LOCAL 0000 LOAD STORE RECALL TRIG MENU EXIT ENTER...
  • Page 14 Section 2: Using the front-panel interface Model 2651A High Power System SourceMeter® Instrument User's Manual To change a value using the navigation wheel Turn the navigation wheel to go to the character you want to change (the character blinks when selected).

  • Page 15: Using The Web Interface

    The instrument web page resides in the firmware of the instrument. Changes you make through the web interface are immediately made in the instrument. Many examples in this manual and in the Model 2651A Reference Manual can be run through the TSB Embedded page of the instrument web interface.

  • Page 16: Web Interface Home Page

    Model 2651A High Power System SourceMeter® Instrument User's Manual ® Once the Model 2651A is configured correctly and connected to the LAN, you can use the LXI Discovery Browser to identify the IP addresses of LXI certified instruments that are set up for automatic IP address selection.

  • Page 17: Tsb Embedded

    Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface NOTE You must reload the page if you change the gateway or subnet mask from the Modify IP configuration page. If you change the IP address, you must type the new IP address in the address bar before you can use the web interface again.

  • Page 18: Exercise: Create And Run A Script With Tsb Embedded

    Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual Exercise: Create and run a script with TSB Embedded The following programming example illustrates the setup and command sequence of a basic source-measure procedure with the following parameters: •...
  • Page 19 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface Figure 5: TSB Embedded page basic_source_measure basic_source_mea -- Restore Model 2651A defaults... smua.nvbuffer1.clear() smua.nvbuffer1.appendmode = 1 3. Enter the code below in the script box (2).
  • Page 20 Model 2651A High Power System SourceMeter® Instrument User's Manual NOTE Commands and parameters for the Model 2651A are case-sensitive. It is important to type in the commands exactly as shown to avoid syntax and execution errors. 4. Click Save Script (3). The script is added to the User Scripts list on the left.

  • Page 21: Reading Buffers

    Section 3: Using the web interface Reading buffers The Reading Buffers tab provides access to the Model 2651A reading buffers. The data used in this example was created and placed in the buffer by the Exercise: Create and run a script with TSB Embedded (on page 3-4).

  • Page 22: Tsp Express

    Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual Figure 7: Downloading the reading buffer 5. Notice that the Source Value column is not populated. To collect source values, before taking readings, use TSB Embedded to set the following attribute: smua.nvbuffer1.collectsourcevalues = 1.
  • Page 23 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 3: Using the web interface NOTE Only one TSB Embedded or TSP Express session can be running and connected to the same instrument. Figure 9: Select TSP Express To run TSP Express: 1.
  • Page 24 Section 3: Using the web interface Model 2651A High Power System SourceMeter® Instrument User's Manual Figure 10: TSP Express 3-10 2651A-900-01 Rev. A / March 2011...

  • Page 25: Making Basic Front-Panel Measurements

    Making front-panel measurements........... 4-2 Introduction ® You can use the Model 2651A High Power System SourceMeter Instrument to make basic measurements from the front panel. In this example, measurements are made on a 10 kΩ resistor. Similar measurements can be made on any two-terminal device under test (DUT) if appropriate source values are used.

  • Page 26: Making Front-Panel Measurements

    Section 4: Making basic front-panel measurements Model 2651A High Power System SourceMeter® Instrument User's Manual Making front-panel measurements Use the following procedure to configure the instrument and make measurements from the front panel. Step 1: Select and set source level Perform the following steps to select the voltage source and set its value to 10 V: 1.

  • Page 27: Step 5: Observe Readings On The Display

    Model 2651A High Power System SourceMeter® Instrument User's Manual Section 4: Making basic front-panel measurements Step 5: Observe readings on the display 1. Observe the readings on the display. Press the TRIG key if necessary to trigger the instrument to begin taking readings.

  • Page 28: Capturing High Power Pulse Waveforms

    (NBTI) testing and transient thermal analysis. In this example, we will demonstrate how to use the fast ADC of the Model 2651A to capture both the current and voltage waveforms of high power pulses.

  • Page 29: Device Connections

    Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual Figure 12: GPIB communication example for fast ADC GPIB 2651A HIGH POWER SYSTEM SourceMeter ® +3.21000V SrcA:+20.0000 A LimAL10.0000V MEAS LIMIT MODE DISPLAY POWER...
  • Page 30 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms Figure 14: Trigger model configuration for fast ADC example Model 2651A Local node* smua.trigger. IDLE_EVENT_ID Idle Arm layer SWEEPING_EVENT_ID arm.count = 1 arm.stimulus SWEEP_COMPLETE_EVENT_ID trigger.timer[1].

  • Page 31: Example Program Code

    Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual 5. Timer 2 receives the SOURCE_COMPLETE_EVENT_ID event trigger from timer 1 and begins its countdown. 6. The SMU trigger model continues to the End Pulse Event, where it pauses and waits for an event trigger from timer 2.

  • Page 32: Example Program Usage

    Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms --[[ Name: CapturePulseV(pulseLevel, pulseWidth, pulseLimit, numPulses) Description: This function outputs voltage pulses with a 1% duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety.
  • Page 33 Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual -- Configure the Pulsed Sweep setup ----------------------------------- -- Timer 1 controls the pulse period trigger.timer[1].count = numPulses - 1 -- -- 1% Duty Cycle trigger.timer[1].delay...
  • Page 34 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms --[[ Name: CapturePulseI(pulseLevel, pulseWidth, pulseLimit, numPulses) Description: This function outputs current pulses with a 1% duty cycle and performs measurements using the fast ADC to capture each pulse in its entirety.
  • Page 35 Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual -- Configure the Pulsed Sweep setup ----------------------------------- -- Timer 1 controls the pulse period trigger.timer[1].count = numPulses - 1 -- 1% Duty Cycle trigger.timer[1].delay = pulseWidth / 0.01...

  • Page 36: Example Program Usage

    Model 2651A High Power System SourceMeter® Instrument User's Manual Section 5: Capturing high power pulse waveforms --[[ Name: PrintPulseData() Description; This function prints the data contained in smua.nvbuffer1 and smua.nvbuffer2 in a format that is copy and paste compatible with Microsoft Excel.
  • Page 37 Section 5: Capturing high power pulse waveforms Model 2651A High Power System SourceMeter® Instrument User's Manual An example call to this function is as follows: CapturePulseI(50, 300e-6, 50, 5) This call will output five 50 A pulses with a 300 μs pulse width. The pulses will be limited to 10 V and have a 1% duty cycle.

  • Page 38: Characterization Of Power Discretes

    Section 6 Characterization of power discretes In this section: Introduction to power discrete I-V curve testing ....... 6-1 Equipment needed for this example......... 6-2 Set up communication.............. 6-2 Device connections ..............6-4 Configuring the trigger model ........... 6-5 Example program code ............6-10 Example program usage ............

  • Page 39: Equipment Needed For This Example

    During this pulse, after the pulse has settled, the current is measured. The duration of the pulse and the duty cycle in which the pulses are applied to the device are controlled, minimizing self-heating. A single Model 2651A High Power System ®...
  • Page 40 5. Press the ENTER key to save the TSP-Link node number. On the Model 2651A SMU #1 (TSP-Link node #1), perform a TSP-Link reset to update it with the linked instruments: 1. Press the MENU key.

  • Page 41: Device Connections

    You can install a resistor to dampen this oscillation and stabilize the gate. Install the resistor between the gate of the device and the force and sense HI of the Model 2651A. If the gate still remains unstable, enable High-C mode on the Model 2651A source-measure unit (SMU).

  • Page 42: Configuring The Trigger Model

    The Model 2651A is configured to sweep the voltage across the drain (or collector) of the device. The Model 2651A is configured to repeat its sweep and will do so as many times as there are steps in the sweep of the Series 2600A.
  • Page 43 Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual Figure 19: Trigger model configuration for IV curve characterization Model 2651A (master) node[1]. smua.trigger. IDLE_EVENT_ID Idle Arm layer SWEEPING_EVENT_ID arm.count = 5 arm.stimulus SWEEP_COMPLETE_EVENT_ID trigger.timer[1].

  • Page 44: Model 2651A Trigger Model Operation

    Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes Model 2651A trigger model operation The following figure illustrates this test's Model 2651A trigger model configuration. Figure 20: Model 2651A trigger model for IV curve characterization Model 2651A (master) node[1].
  • Page 45 Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual When the configured trigger model of the Model 2651A is initiated, the following occurs: 1. The source-measure unit (SMU) trigger model passes through the Arm Layer, enters the Trigger Layer, then outputs the ARMED event trigger.

  • Page 46: Series 26Xxa Instrument's Trigger Model Operation

    (if any), takes a measurement, and then outputs the MEASURE_COMPLETE event trigger. 5. TSP-Link trigger 1 receives the MEASURE_COMPLETE event trigger and releases the TSP-link trigger line, telling the Model 2651A that it has completed its step and that the Model 2651A may begin its sweep.

  • Page 47: Example Program Code

    Lines starting with node[2]. are commands that are being sent to the Series 26xxA through the TSP-Link interface. All other commands are executed on the Model 2651A. 6-10 2651A-900-01 Rev. A / March 2011...
  • Page 48 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes --[[ Title: IV Curves Example Script Description: This script will perform a series of IV curves on a MOSFET or IGBT device and will return the data in a Microsoft Excel compatible format for graphing and analysis.
  • Page 49 = tsplink.TRIG_SYNCHRONOUSM tsplink.trigger[1].stimulus = smua.trigger.ARMED_EVENT_ID -- TSP-Link Trigger 1 is used by the 2651A to command the 26xxA -- to step the gate and for the 26xxA to report to the 2651A -- that it has completed the step. tsplink.trigger[2].clear() tsplink.trigger[2].mode = tsplink.TRIG_FALLING...
  • Page 50 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes -- Prepare the Drain SMU (2651A) reading buffers smua.nvbuffer1.clear() smua.nvbuffer1.collectsourcevalues smua.nvbuffer1.fillmode = smua.FILL_ONCE smua.nvbuffer2.clear() smua.nvbuffer2.collectsourcevalues smua.nvbuffer2.fillmode = smua.FILL_ONCE -- Configure the Gate SMU(26xxA) -------------------------------- node[2].smua.reset() node[2].smua.source.func...
  • Page 51 Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual -- Prepare the Gate SMU (26xxA) reading buffers node[2].smua.nvbuffer1.clear() node[2].smua.nvbuffer1.collectsourcevalues = 1 if node[2].smua.nvbuffer1.fillmode ~= nil then node[2].smua.nvbuffer1.fillmode = node[2].smua.FILL_ONCE node[2].smua.nvbuffer2.clear() node[2].smua.nvbuffer2.collectsourcevalues if node[2].smua.nvbuffer1.fillmode ~= nil then node[2].smua.nvbuffer1.fillmode...
  • Page 52 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 6: Characterization of power discretes --[[ PrintIVcurveData(gsteps, dsteps) Description: This function will output the data collected by the IV_Curves() function in a Microsoft Excel compatible format. For each step of the gate, this function will output three columns that contain the drain sweep data and the gate data in the first row.

  • Page 53: Example Program Usage

    Section 6: Characterization of power discretes Model 2651A High Power System SourceMeter® Instrument User's Manual Example program usage The functions of this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script. A test can be executed by calling the function IV_Curves(gstart, gstop, gsteps, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) with the appropriate values passed to it in its parameters.

  • Page 54: Increasing Smu Current Sourcing Ability

    Section 7 Increasing SMU current sourcing ability In this section: Introduction to combining SMUs ..........7-1 Combining SMUs to increase current sourcing capability ..7-2 Equipment needed for this example......... 7-3 Set up communication.............. 7-3 Device connections ..............7-4 Configuring the trigger model ........... 7-6 Example program code ............

  • Page 55: Combining Smus To Increase Current Sourcing Capability

    Because each Model 2651A can produce up to 50 A, placing the instruments in parallel can deliver up to 100 A. In this example, we will sweep the DUT using each Model 2651A to source exactly half of the desired total current level for each point in the sweep.

  • Page 56: Equipment Needed For This Example

    ® TSP-Link connection enables communication between the two instruments. Commands for the Model 2651A SMU #2 (node #2) and the Series 2600A SMU #3 (node #3) are sent over the TSP-Link interface. Figure 24: GPIB communication example for Rds(on) sweep...

  • Page 57: Device Connections

    5. Press the ENTER key to save the TSP-Link node number. On the Model 2651A SMU #1 (TSP-Link node #1), perform a TSP-Link reset to update it with the linked instruments: 1. Press the MENU key.
  • Page 58 You can install a resistor to dampen this oscillation and stabilize the gate. Install the resistor between the gate of the device and the force and sense HI of the Model 2651A. If the gate still remains unstable, enable High-C mode on the Model 2651A source-measure unit (SMU).

  • Page 59: Configuring The Trigger Model

    Configuring the trigger model When the trigger model is correctly configured, you can achieve pulsed measurements with precise timing and current levels up to 100 A for the combined Model 2651A instruments. Refer to the Example program code (on page 7-9) for an implementation of this trigger model.
  • Page 60 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability Figure 26: Trigger model configuration for Rds(on) sweep Model 2651A (master) node[1]. smua.trigger. IDLE_EVENT_ID Idle Arm layer SWEEPING_EVENT_ID arm.count = 1 arm.stimulus SWEEP_COMPLETE_EVENT_ID trigger.timer[1].

  • Page 61: Master Model 2651A Node[1] Trigger Model Operation

    Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual Master Model 2651A node[1] trigger model operation In the master Model 2651A (node[1]) trigger model, timer 1 controls the period of the pulse, while ®...

  • Page 62: Series 2600A Trigger Model Operation

    Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability When the trigger model of Model 2651A (subordinate, node[2]) is initialized, the following occurs: 1. The source-measure unit (SMU) trigger model leaves the idle state, flows through the arm layer, enters the trigger layer, and reaches the Source Event, where it waits for an event trigger.
  • Page 63 Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual The following script contains all the code necessary to perform an Rds(on) sweep up to 100 A using ® two Model 2651A High Power System SourceMeter Instruments and a Series 2600A System ®...
  • Page 64 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability --[[ Name: DualSmuRdson(gateLevel, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) Description: This function uses two 2651A SMUs to perform a pulsed Rds(on) sweep with currents up to 100A.
  • Page 65 Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual -- Set the delay so that the measurement is near the end of the pulse -- Prepare the reading buffers smua.nvbuffer1.clear() smua.nvbuffer1.collecttimestamps smua.nvbuffer1.collectsourcevalues smua.nvbuffer1.fillmode = smua.FILL_ONCE...
  • Page 66 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability -- Configure 2651A #2 (Drain SMU 2) ----------------------------------- node[2].smua.reset() node[2].smua.source.func = node[2].smua.OUTPUT_DCAMPS node[2].smua.sense = node[2].smua.SENSE_REMOTE node[2].smua.source.offmode = node[2].smua.OUTPUT_NORMAL node[2].smua.source.offfunc = node[2].smua.OUTPUT_DCAMPS node[2].smua.source.offlimitv = 10...
  • Page 67 Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual -- Configure the 26xxA (Gate SMU) --------------------------------- node[3].smua.reset() node[3].smua.source.func = node[3].smua.OUTPUT_DCVOLTS node[3].smua.sense = node[3].smua.SENSE_REMOTE node[3].smua.source.levelv = gateLevel node[3].smua.source.highc = node[3].smua.ENABLE -- If you find your gate oscillating even with a dampening resistor -- in place, try enabling high-C mode to help stabilize the gate.
  • Page 68 Model 2651A High Power System SourceMeter® Instrument User's Manual Section 7: Increasing SMU current sourcing ability --[[ Function: PrintDualSmuRdsonData() Description: This function processes the data stored in the SMU reading buffers by function DualSmuRdson() and prints back the individual SMU data and the combined SMU data and Rds(on) readings in a format that is copy and paste compatible with Microsoft Excel.

  • Page 69: Example Program Usage

    Section 7: Increasing SMU current sourcing ability Model 2651A High Power System SourceMeter® Instrument User's Manual Example program usage The functions in this script allow the sweep parameters of the test to be adjusted without having to rewrite and rerun the script. A test can be executed by calling the function DualSmuRdson(gateLevel, dstart, dstop, dsteps, pulseWidth, pulsePeriod, pulseLimit) with the appropriate values passed to it in its parameters.

  • Page 70: Troubleshooting Faqs

    Need different line frequency or voltage I need to use a Model 2651A at a different line frequency or voltage. What do I need to do? The Model 2651A supports a line frequency of either 50 Hz or 60 Hz. The factory configures the Model 2651A to automatically detect and operate at line frequencies (either 50 Hz or 60 Hz) each time the instrument power is turned on.

  • Page 71: Save The Present State Of The Instrument

    Model 2651A High Power System SourceMeter® Instrument User's Manual • To view the IP address of the Model 2651A, press MENU. Select LAN > STATUS > IP-ADDRESS. If a valid IP address is displayed, the instrument configuration is correct. If 0.0.0.0 is displayed, the IP address is not valid.

  • Page 72: Next Steps

    Additional Model 2651A information......... 9-1 Additional Model 2651A information This manual has prepared you to start using your new Model 2651A for your real-world applications. For more detailed information about the Model 2651A, refer to the Keithley Instruments Model 2651A Reference Manual, part number 2651A-901-01.

  • Page 73: Index

    REL • 2-2 Device connections • 6-4 RUN • 2-2 Example program code • 6-10, 6-16 SPEED • 2-2 High power pulse • 5-1 SRC • 2-2 Trigger model • 5-2 STORE • 2-2 2651A-900-01 Rev. A / March 2011 Index-1...
  • Page 74 Index Model 2651A High Power System SourceMeter® Instrument User's Manual TRIG • 2-2 Selecting auto • 4-2 Reading buffer • 3-7 Downloading • 3-7 Reading buffers • 3-7 LabVIEW drivers • 8-2 Displaying readings • 3-7 Linear sweep • 6-5 Readings LXI Discovery Browser •...
  • Page 75 Model 2651A High Power System SourceMeter® Instrument User's Manual Index TSP-Link Nodes • 6-2 Voltage Source, set level • 4-2 Warranty • 1-1 Web interface • 3-1 Accessing • 3-1 Browser requirements • 3-1 Home page • 3-2 IP address configuration • 3-2 Reading buffers •...
  • Page 76 M E A S U R E C O N F I D E N C E Keithley Instruments, Inc. Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY • www.keithley.com 12/06...

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