Typical Meter Values For The Vacuum System - Agilent Technologies 7500 ICP-MS Operator's Manual

Agilent 7500 ICP-MS ChemStation Operator's Manual
Startup, Shutdown and Status

Typical Meter Values for the Vacuum System

Refer to the following meter values when the error occurs.
1 After the vacuum is ON
Parameters
Backing pressure (BK)
Backing pressure (BK)
Analyzer pressure (AN)
The Agilent 7500 goes back to Shutdown mode.
2 After the plasma is OFF
Parameters
Interface pressure
Analyzer pressure (AN)
The Agilent 7500 goes back to Shutdown mode.
3 After the plasma is OFF
Parameters
Analyzer pressure (AN)
The Agilent 7500 goes back to Shutdown mode.
3-24
Limit
> 100 Pa if BK is higher, even 60 seconds after the vacuum is ON.
> 25 Pa if BK is higher, even 70 minutes after the vacuum is ON.
-4
> 5 x 10 Pa if AN is higher, even 5 hours after the vacuum is ON.
Limit
> 450 Pa if IF is higher, even 2 minutes after the IF pump is ON.
-3
> 1.2 x 10 Pa if AN is higher, even 3 minutes after the gate valve is
opened.
Limit
-4
> 5 x 10 Pa if AN is higher, even 15 seconds after the gate valve is
closed.
Conditions
Conditions
Conditions