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Agilent 7500 ICP-MS ChemStation Operator's Manual
Tuning
Work coil potential
E
Matching
Network
t
Torch
Sample In
Electrical Model of the Plasma and the Interface Region
In the plasma
The ionization efficiency of elements in the Ar plasma can be calculated using the
Saha-Egggert Equation given below:
(
)
2πmkT
a
=
------------------------- -
---------- -
–
3
Neh
1 a
a:
Ionization efficiency
Ne:
Electron density
m:
Mass of an ion
V:
Ionization potential of an element
k:
Boltzman constant
T:
Electron temperature
h:
Plank constant
Z:
Partition function
RF source
Work Coil
3
-- -
–
V
2
+
------ -
2Z
kT
×
×
------ -
e
Z
Plasma potential
E
Ion energy
Sampling
Cone
Skimmer
Cone
t
4-19
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