All Agilent Laser Systems Share A Similar Configuration; Figure 17 Typical Single-Axis Agilent Laser Interferometer Positioning System - Agilent Technologies 5517B User Manual

6
Using the Laser Head in a System
Laser
Beam-directing
Beam
Laser Head
Optics
Agilent 5517C
(beam benders,
Laser
beam splitters)
Beam
Measurement
Optics
Agilent 10702A Interferometer
Laser
and
Beam
Receiver
Agilent 10703A Retroreflector
Agilent E1708A
Reference Measurement
Frequency Frequency
Laser Head and Optics
(Described in this Manual)
Measurement System Electronics
(Described in other Manuals)
Measurement System Electronics
Personal Computer (PC) Measurement Data
Agilent N1231B PCI Board

Figure 17 Typical single-axis Agilent Laser Interferometer Positioning System

A l l A g i l e n t l a s e r s y s t e m s s h a r e a s i m i l a r c o n f i g u r a t i o n
Figure 17 shows PC- compatible electronics and a linear interferometer, but
the system configuration is the same for all types of Agilent electronics
and interferometers.
All Agilent laser systems require a reference signal from the laser head
and a measurement signal from the receiver to be connected to the
electronics to determine relative movement between the optics.
All Agilent laser systems feature separate laser head, interferometer, and
reflector. The laser beam must be aligned with the optical elements and
the motion of the optics to preserve beam alignment and provide an
accurate measurement. The optics and receiver must be aligned so the
beam strikes the lens of the receiver to generate a measurement signal.
Misalignment results in loss of the measurement signal.
Agilent 5517B/BL/C/D/DL/FL User's Guide 53