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2.
Turn the chamber assembly 45 degrees counterclockwise.
3.
Lift the chamber assembly off the bayonet connector.
Disassembling the chamber assembly
The chamber assembly components can be contaminated
Warning:
with toxic materials. Wear nitrile gloves at all times while handling
the components.
To remove the ion exit plate
1.
Remove the 4 screws securing the ion exit plate to the ion block.
Ion exit plate
Ion block
Source maintenance
7-15
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Troubleshooting
