Vacuum system .................................................................................................. 1-4
Status switch panel ......................................................................................... 1-8
Gas flow valves............................................................................................... 1-10
Vacuum connections ...................................................................................... 1-15
Gas inlet panel ............................................................................................... 1-16
EPC power switch ..................................................................................... 1-18
Low resolution tuning ..................................................................................... 2-1
High resolution tuning .................................................................................. 2-13
Ion Energy ...................................................................................................... 2-18
Alpha Slit ....................................................................................................... 2-19
Z4 Restrictor................................................................................................... 2-19
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Table of Contents