N2 Gas Piping - EBARA ESA200W Instruction Manual

CAUTION When several pumps are used, be sure to connect the cooling
CAUTION When the cooling water connections are incorrect and the flow
CAUTION When the cooling water supply is left on while the pump is

4.2.3 N2 Gas Piping

Cut tube at right angles and make the end-face perfectly smooth. Then connect
the tube to the tube fitting assembly of the N2 gas purge port. The tube is a
push-fit onto the shoulder of the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand.
After this, use a tool to tighten the nut further by 1 + 1/4 turns.
To connect the tube again after this, install the tube already fitted to the ferrule
and re-tighten the retaining nut slightly after the initial tightening (generally,
tighten by a further quarter turn after tightening by hand).
PM10U
water pipes to each pump in parallel. The cooling water will
flow more or less easily according to the type of pump and
the piping. Be sure to select the correct piping so as to
ensure the appropriate cooling water flow rate for all pipes
used.
is reversed, a flow rate different from the normal value will be
displayed. Pump may not be cooled properly under this
condition, and this cause serious problem.
Be sure therefore to connect correctly to avoid problems.
stationary dew condensation will form on the water-cooled
parts in locations with high humidity.
Make it a rule therefore to stop the cooling water when water
droplets can be detected on the outer surface of the pump
cooling water piping as this suggests the possibility of dew
condensation in the pump.
P.17
EBARA
CORPORATION