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P.30
6.2 LCD Indication
The operating status of the pump is displayed on the LCD display of the
controller. For details of display, see Table 6.1.
No
Current
1
Control mode
2
Pump running mode
Running history
3
(Indication of history)
Alarm history
4
(Indication of history)
Pump unit No.
5
Pump type
6
Voltage
Total operation time
7
Heater temperature (option)
8
Back pressure (option)
9
Pump N2 gas flow
10
Cooling water flow
11
Pump casing temperature
12
Motor speed
13
WARNING/ALARM
14
PM10U
Table 6.1 LCD controller indication
ITEM
B P :
M P :
C O N T R O L :
M O D E :
P U M P
H I
A L A R M /
H I
U N I
& & & & & & & &
P U M P
E S A & & &
O P E .
H T
° C
B A C K
P U M P
W A T E R
P U M P
B P
$ $ $ $ $ :
$ $ $ $ $ $ $ $ $ $ $ $ $ $
INDICATION
# # .
#
A
# # .
#
A
L O C A L
N O R M A L
R U N N I
S T O R Y ?
W A R N I
S T O R Y ?
T
N O
T Y P E
T I
M E
# # # # #
1 :
# # #
2 :
3 :
# # #
4 :
P R E S S U R E
# # .
#
k P a
N 2
F L O W
# # .
#
P a m
F L O W
# # .
#
L /
C A S I
N G
# # #
° C
S P E E D
# .
# k
m i
$ $ $ $ $ $ $
N G
N G
* * *
V
h
# # #
# # #
3
/
s
m i
n
n -
1
%
EBARA
CORPORATION
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