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Spare (Maintenance) Parts List - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

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8.5 Spare (Maintenance) Parts List

Following parts are needed for maintenance in customer's site.
1. Standard consumption Part.
Parts' Name
Lubricant oil
2. Recommendable Part for Safe Operation.
Parts' Name
O-ring (Viton A)
3. Recommendable Parts for Quick Maintenance.
Parts' Name
Exhaust check valve
4. Recommendable Spare Parts. (Not needed for each pump.)
Parts' Name
Water flow sensor
N
flow sensor
2
Thermo couple sensor bolt
N
gas pressure regulator
2
Motor driver for BP
5. Electric Spare Parts.
Parts' Name
Control Panel
BP Motor Driver
LCD Controller
Following labels are attached to pump covers. When they are hard to read for
discoloring or peeling off, please stick them again as directed.
PM10U
Table. 8.2 Spare (Maintenance) Parts List
Type
BARRIERTA J100ES
Type
For NW25 center ring
For NW40 center ring
G55(For Exh. check valve)
Type
32X80L
Type
10 L/min
84.4 Pa m
T TYPE, M8
R31-200-C121
-
Type
ESAG2200E
IMDGA200
REMG4
Order No.
C-0402-000-0111
Order No.
C-1210-351-0001
C-1210-352-0001
C-1210-089-0201
Order No.
C-2244-031-0001
Order No.
C-5137-008-0001
3
/s
C-5138-062-0111
C-1019-121-0001
C-2250-101-0001
A-2017-224-0001
Order No.
A-2017-224-0001
C-5114-317-0001
EBARA
P.61
CORPORATION

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