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P.64
9. Disconnection and Transportation
WARNING When the pump has been used for exhausting highly toxic
CAUTION
Toxic gases may be generated from by-products in the piping or pump in pump
disconnection from the tool piping for repair and replacement or flange removal
for maintenance. Gain relevant information about the process gases from your
tool suppliers, and be sure that the gas concentrations in the work areas are at
quarter or under the acceptable values specified using appropriate measurement
equipment.
Without assurance of gas safety, instruct the workers to wear proper personnel
protective equipment if necessary to protect them from gas hazards.
personnel protective equipment must include at least gloves, safety goggles, and
a gas mask.
To disconnect and transport the pump, proceed as follows.
(1)
Stop the pump and replace all gases inside the pump by purging them with
N2 gas.
(2)
Turn off the power supply to the pump and unplug the power and signal
cables.
(3)
After you have fully closed the N2 regulator, remove the N2 pipe, seal off
the N2 purge port with a sealing flange.
(4)
Remove the cooling water pipes.
(5)
Remove the vacuum and exhaust pipes and completely seal off the inlet
and exhaust ports of the pump with a blind flange or similar seal. Seal off
all process gas discharge points such as the differential port by using a
blind flange.
PM10U
gases such as arsenic and mercury compounds, be sure to
contact EBARA Corporation before you return the pump.
Refer to Appendix 4 and 5 or the format required when
customer returns their pump to Ebara service center for
overhaul or rebuild
In the interest of safety during the transportation, disassembly
and cleaning of the pump, be sure to take note of the gases
that have been handled.
The
EBARA
CORPORATION
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