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P.70
10.3 Troubleshooting (3) ALARM
WARNING Interrupt Circuit Breaker (CB) before starting on wiring and
WARNING The pump casing and exhaust piping become extremely hot
WARNING Check for gas leaks after installing and maintaining the piping.
PM10U
maintenance work.
Do not switch on the power supply to the pump until work is
completed.
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
Gas leaks will result in the discharge of harmful and
dangerous substances and in abnormal reactions due to the
ingress of air into the pump. When checking for gas leaks by
pressurization, please pressurize by less than 0.05 MPa into
the purge port and do check.
EBARA
CORPORATION
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Troubleshooting
