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P.68
10.2 Troubleshooting (2) WARNING
WARNING
WARNING
WARNING
PM10U
Interrupt Circuit Breaker (CB) before starting on wiring
and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
The pump casing and exhaust piping become extremely hot
during
operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air
into the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
EBARA
CORPORATION
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Troubleshooting
