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ESA300W
EBARA ESA300W Manuals
Manuals and User Guides for EBARA ESA300W. We have
1
EBARA ESA300W manual available for free PDF download: Instruction Manual
EBARA ESA300W Instruction Manual (80 pages)
Multi-stage dry vacuum pump
Brand:
EBARA
| Category:
Water Pump
| Size: 1.55 MB
Table of Contents
Environmental Basic Policies
3
Safety Information
4
Important Prior Warnings
5
Standard Limited Warranty
10
Table of Contents
11
Contents
11
Foreword
13
Introduction
13
Environmental Concerns
14
Product Description
15
Outline
15
Pump Module
15
N2 Gas
15
Cooling Water
16
Exhaust
16
Control System
16
Warning
16
Operation Status Control
17
The Way of Pump Moving
17
Preparation
17
Moving Method
18
Detailed Specifications
19
Installation
24
Movement and Fixation
24
Location
24
Caster and Adjustment Foot
24
Piping
26
Vacuum and Exhaust Piping
26
Cooling Water Piping
27
N2 Gas Piping
28
Ventilation Duct
29
Electrical Wiring
30
Grounding
30
Power Supply Wiring
31
Control Signal Wiring
32
Power Supply for the Options
35
LCD Controller
36
LCD Outline
36
LCD Indication
37
Setting the Operational Mode
41
Setting the Pump Operation Control Mode
43
Setting the DIP Switch
43
Setting the Pump Running Mode
44
Setting the Normal Rotational Speed
44
Setting the Low Rotational Speed
44
Setting the WARNING Value for the Pump N2 Flow
45
Setting the WARNING Value for the Back Pressure (Option)
45
Dip Switch
46
DIP Switch Setting Display
50
Starting/Stopping the Pump with the LCD Controller
51
Operation
52
Before Starting
52
Start/Stop
54
LOCAL (Pump Side) Start/Stop
55
REMOTE Start/Stop
56
COMMUNICATION Start/Stop
57
Maintenance and Inspection
58
Internal Energies
58
Power Source
58
Cooling Water
58
Nitrogen Gas
58
Routine Inspection
59
Vacuum and Exhaust Piping
61
Lubricant Oil
62
Spare (Maintenance) Parts List
66
List of Wastes During Maintenance
67
Overhaul
68
Disconnection and Transportation
69
Troubleshooting
72
Troubleshooting (1) Basic Trouble
72
Troubleshooting (2) WARNING
74
Troubleshooting (3) ALARM
76
Troubleshooting (4) Option
79
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