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INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA70W
MODEL ESA70WN
STANDARD MODEL
200V（50Hz）、200-220V（60Hz）
Caution:
Please read and understand this INSTRUCTION MANUAL thoroughly
before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
※「Model ООО」 in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY GROUP
ESA70_STD_2_E_Rev.0
EBARA
Corporation
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Table of Contents
Troubleshooting
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Summary of Contents for EBARA ESA70W
- Page 1 ESA70_STD_2_E_Rev.0 INSTRUCTION MANUAL MULTI-STAGE DRY VACUUM PUMP MODEL ESA70W MODEL ESA70WN STANDARD MODEL 200V（50Hz）、200-220V（60Hz） Caution: Please read and understand this INSTRUCTION MANUAL thoroughly before using this equipment. Be sure to keep this INSTRUCION MANUAL on hand for future reference To Facility and Tool Manufactures: Be sure to distribute this INSTRUCTION MANUAL to all end-user personnel actually operation this equipment.
- Page 2 Do not reproduce or reprint any portion of this manual without permission. Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations. Model OOO in this catalog is our model code. All rights reserved, copyright EBARA EBARA Corporation...
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Page 3: Environmental Basic Policies
Corporation, and each person will demonstrate this awareness when carrying out his or her duties. We will widely publicize these basic policies to regional societies and the general public and work to make Ebara's position on the environment clear to society in general. EBARA... -
Page 4: Safety Information
EBARA in detail. If you have any questions on pump operation, safety, or maintenance, please does not hesitate to contact EBARA directly. Refer to Global network for contact address. Three terms designating the level of hazard are used in this manual. -
Page 5: Important Prior Warnings
Pump oil may be contaminated with process byproducts. Treat it as a hazardous WARNING waste. See Table 3.1 for oil quantities. EBARA Corporation... - Page 6 When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. Do not alter the pump member nor change any parts without EBARA’s consent or WARNING approval.
- Page 7 Never operate the pump without pump cover for safety. CAUTION EBARA Corporation...
- Page 8 Hazardous Voltage may shock, burn, or cause death. Turn power off and lockout before servicing. WARNING 警 告 Hazardous Voltage Contact will cause injury or death by electrical shock. Disconnect line power before servicing. 危険電圧部あり。接触すると重傷または死亡の 危険があります。電源供給を止めてブレーカを切った状態で メンテナンスをして下さい。 C-7110-313-0001 EBARA Corporation...
- Page 9 Raise all adjuster-feet fully when moving. 危 険 Heavy Object Can cause impact injury through falling or tipping. Use appropriate, properly rigged lifting equipment and keep from under suspended pump. Raise all adjuster feet fully when moving. 重量物。落下及び転倒により重傷または死亡の危険があります。 吊り上げたポンプの下に入らないで下さい。 移動時は全アジャスタフットを上限まであげて下さい。 C-7110-316-0001 EBARA Corporation...
- Page 10 Hot surface may burn or cause injury. Allow the eyebolt to cool before servicing. WARNING 警 告 Hot Surfaces. Will Cause burn. Do not touch eyebolts during pump running for some time after stops. 高温部あり。火傷のおそれがあります。 ポンプ運転中及び停止後しばらくの間はアイボルト部に 触れないで下さい。 C-7110-317-0001 EBARA Corporation...
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Page 11: Standard Limited Warranty
EBARA. Coverage For the duration of the Warranty period, EBARA warrants this ESA pump from failure due to defects in materials or workmanship. For such failures, EBARA will, at its option, either replace or repair the pump free of charge Such repair or replacement will not extend the duration of the warranty beyond the original period. -
Page 12: Table Of Contents
4.2.1 Vacuum and Exhaust Piping ............14 4.2.2 Cooling Water Piping ..............15 4.2.3 N2 Gas Piping ................16 4.2.4 Ventilation Duct ................17 4.3 Electrical Wiring ................... 18 4.3.1 Grounding ..................18 4.3.2 Power Supply Wiring..............19 EBARA Corporation... - Page 13 8.6 List of wastes during maintenance ............. 58 8.7 Overhaul ....................59 9. Disconnection and Transportation............60 10. Troubleshooting..................62 10.1 Troubleshooting (1) Basic trouble ............ 62 10.2 Troubleshooting (2) WARNING............63 10.3 Troubleshooting (3) ALARM .............. 66 10.4 Troubleshooting (4) Option ............... 69 EBARA Corporation...
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Page 14: Foreword
1. Foreword We appreciate that you have selected an EBARA dry vacuum pump Model ESA70W(N). This pump has been manufactured with much care and attention so that it can be operated safely and satisfactorily. Incorrect operation will result in lack of performance and cause accidents and injuries to personnel. -
Page 15: Environmental Concerns
If the pump becomes damaged during shipment or if parts are missing, WARNING immediately contact EBARA. If a leaking or damaged product is used, an accident resulting in injury or death could occur or the product could become further damaged. Even if leakage occurs, take measures to ensure they will not be directly discharged from the site, as such leakage also wastes resources. -
Page 16: Product Description
The nitrogen gas selector is locating on the right side of the unit, facing the LCD controller and other utility connectors. EBARA Corporation... -
Page 17: Cooling Water
The pump will continue to operate in this condition. An ALARM signal output is generated and the pump will stop automatically when the upper mechanical safety limit is reached during pump operation. EBARA Corporation... -
Page 18: Operation Status Control
Be sure to contact EBARA Corporation for details on checking the WARNING and ALARM setting conditions. • Note that the warning indications of the Model ESA70W(N) dry pump are different from the conventional pumps like as UERR, A, AA, AAS series, based on SEMI standard E73. -
Page 19: Moving Method
/ ditches and pump shall be moved on it by two persons with care. Steel Plate If pump should lose its balance when moving and start tripping over, never try to sustain the pump, get away from the pump immediately. EBARA Corporation... -
Page 20: Detailed Specifications
3.4 Detailed Specifications The following tables and figures should be consulted for pump specification, dimension and performance details. Table 3.1 Specification Model Model ESA70W Model ESA70WN Pumping Speed(50/60Hz) 7000/8400 L/min Ultimate Pressure(50/60Hz) 0.27 / 0.13Pa 0.4 / 0.27Pa Gas Inlet... - Page 21 EBARA Corporation...
- Page 22 Performance Curve (Model ESA70W) at 50Hz 10000 1000 1000 10000 100000 Inlet Pressure (Pa) at 60Hz 10000 1000 1000 10000 100000 Inlet Pressure (Pa) EBARA Corporation...
- Page 23 (10) Performance Curve(Model ESA70WN) at 50Hz 10000 1000 1000 10000 100000 Inlet Pressure (Pa) at60Hz 10000 1000 1000 10000 100000 Inlet Pressure (Pa) EBARA Corporation...
- Page 24 Power Earth Leakage Breaker Control Circuit (ELB) Motor Starter Motor Starter Pressure Gauge Gas Flow Sensor Regulator Main Pump Gas Outlet Motor (MP) Water Main Pump Motor Check (MP) Valve Cooling Water Flow Sensor Figure 3.3 System Flow EBARA Corporation...
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Page 25: Installation
Four integral mobile support units consisting of a caster and a height-adjustment foot each are provided underneath the pump base. To move the pump, raise the four adjustment feet by turning the holding nuts in the counterclockwise direction. Caster Adjuster (Vibroisolating rubber) Approx 15mm Fig. 4.1 Caster EBARA Corporation... - Page 26 The adjustment allowance is approximately 15 mm. NOTE If the pump is not leveled, shortage of the lubrication oil supply to the bearing may be caused. NOTE To prevent vibrations and airborne noises, keep horizontal level of pump with the adjustment feet. EBARA Corporation...
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Page 27: Piping
When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA Corporation... -
Page 28: Cooling Water Piping
Even when the cooling water flow rate drops, the pump will continue to operate for CAUTION 5 minutes. The material selected for the water piping of facility side should have a heat resistance so that it can withstand a maximum temperature of at least 70℃ at the operating pressure. EBARA Corporation... -
Page 29: N2 Gas Piping
Figure 4.3 Tube Fitting Assembly For safety, be sure to use N2 gas which purity is more than 99.999%. CAUTION Impurities of N2 gas may cause an accident when the pump is used for exhausting toxic and/or inflamable gases. EBARA Corporation... -
Page 30: Ventilation Duct
The exhaust noise of the pump will give rise to acoustic resonance inside the pump unit and result in an abnormal noise being generated. Never operate the pump without pump cover for safety. CAUTION EBARA Corporation... -
Page 31: Electrical Wiring
Check with a qualified electrician or serviceman if the grounding instructions are not completely understood, or if in doubt as to whether the product is properly grounded. Do not modify the plug provided; if it will not fit the outlet, have the proper outlet installed by a qualified electrician. EBARA Corporation... -
Page 32: Power Supply Wiring
Ｄ Ｃ Ｂ Fig 4.4 Power Supply Terminal Block (As seen from connecting side) Table 4.3 Terminal Block Specification Pump model Model ESA70W(N) Receptacle type JL04HV-2E22-22PE-B Recep. Manufacturer Japan Aviation Electronics Industry Co., Ltd. Adapted plug type JL04V-6A22-22SE-EB Suitable wire UL1015 AWG #10 * Lengthen grounding wiring 1.2m from other wiring(R,S,T). -
Page 33: Control Signal Wiring
WARNING : OPEN, Alternate ALARM STATUS (+) ALARM : OPEN, Alternate REMOTE STATUS (+) REMOTE : ON MP START/STOP (−) BP START/STOP (−) MP START/STOP STATUS (−) BP START/STOP STATUS (−) WARNING STATUS (−) ALARM STATUS (−) REMOTE STATUS (−) EBARA Corporation... - Page 34 RESERVED (−) RESERVED (−) EMO STATUS (−) PUMP N2 WARNING STATUS (−) RESERVED (−) RESERVED (−) BACK PRESSURE HIGH WARNING STATUS (−) *1 RESERVED (−) RESERVED (−) As optional It can change to “Abnormality：OPEN, Alternate“ by DIP SW. setting. EBARA Corporation...
- Page 35 Table 4.7 CN-Z & CN-Y Signal Contacts Input Pump side Circuit Customer's connection Signal 12VDC 1kΩ 10mA Min. Open Collector Dry Contact Output Pump side Circuit Customer's connection Signal 4VDC-27VDC 100mA Max. Open Collector 4VDC-27VDC ＥＭＯ 100mA Max. Dry Contact EBARA Corporation...
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Page 36: Power Supply For The Options
Interface Controller N2 Solenoid Valve Power Supply for the options is kept applying voltage when Earth Leakage DANGER Breaker (ELB) turns on during the pump is supplied the power. Do not use the power supply for other purposes. WARNING EBARA Corporation... -
Page 37: Lcd Controller
ENTER For using at DIP switch selection And change hierarchy of screen [LED] B.P. RUN BP running M.P. RUN MP running LOCAL LOCAL mode WARNING WARNING condition ALARM ALARM condition Fig 6.1 LCD controller EBARA Corporation... -
Page 38: Lcd Indication
F L O W # # . Motor speed S P E E D WARNING/ALARM $ $ $ $ : $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ EBARA Corporation... - Page 39 Use the Display Select Switch (▲ ▼) to change the display. The WARNINGs/ALARMs that have currently been generated can be displayed with the Display Select Switch. See Fig. 6.2 for the key operation of the pump operation status display. EBARA Corporation...
- Page 40 WATER FLOW Cooling water flow ##．# L/min ▽ △ Occurrence date PUMP CASING Casing temp. ### ℃ See Table 6.2 for the alarm codes. ▽ Motor speed Fig. 6.2 Key operation for the pump operation status display screen EBARA Corporation...
- Page 41 Back pressure high( ▲) Emergency off( Back pressure sensor damaged( ▲) ▲) EXT. interlock IO communication error (IO board) IO communication error IO communication error (C_IO board) MP current high BP current high “▲” indicates that the item is optional. EBARA Corporation...
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Page 42: Setting The Operational Mode
Sets the DIP switch to ON. Switches the display of the operational mode setting screen. ▼ Sets the DIP switch to OFF. Switches the display of the operational mode setting screen. ENTER Determines the selected setting. See Fig. 6.3 for how to set the operational modes. EBARA Corporation... - Page 43 ▲ ▼ SET POINT • Setting the N flow low point. PUMP N2 WARNING？ ▲ ▼ SET POINT • Setting the WARNING value for the back BACK PRESSURE？ ▼ Fig. 6.3 How to set the operational mode EBARA Corporation...
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Page 44: Setting The Pump Operation Control Mode
(start/stop with the LCD controller) COM MODE : Enables the communication operation (start/stop with RS232C communication) The mode that is currently not set is displayed. If you do not need to set, press PRG. key to go back to the previous screen. EBARA Corporation... -
Page 45: Setting The Dip Switch
OUTPUT N.OPEN ＰＲＧ． The up and down arrow keys, “▲” and “▼, ” turn On and OFF the DIP switch. The key BZ.OFF switches the selection from 1 to 8. See 6.4 for details of the DIP switch. EBARA Corporation... -
Page 46: Setting The Warning Value For The Pump N2 Flow
“▲” : Increase the setting value by 0.5 kPa “▼” : Decrease the setting value by 0.5 kPa Upper limit : 30.0 kPa Lower limit : 5.0 kPa Factory setting : 20.0 kPa Reset value for WARNING : Set value -2.0 kPa EBARA Corporation... -
Page 47: Setting The Warning Value For The Water Flow
Factory setting : 3.0 L/min Set Water Dly “▲” : Increase the setting value by 1 sec “▼” : Decrease the setting value by 1 sec Upper limit : 60sec Lower limit : 5 sec Factory setting : 60sec EBARA Corporation... -
Page 48: Dip Switch
Normal Open Normal Close ----- ----- ----- ----- Back press WARNING output * Normal Open Normal Close ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- * Optional EBARA Corporation... - Page 49 [ NOTE ] When there is no special interface for ESA , you cannot select "MOMENTARY Signal “. When there is the special interface for ESA , you can select "MOMENTARY Signal “or "ALTERNATE Signal ". EBARA Corporation...
- Page 50 60 seconds. DIP SW-C No.1 Can be select Normal Open / Normal Close of Pump N2 WARNING. DIP SW-C No.3 Can be select Normal Open / Normal Close of Back Pressure WARNING. EBARA Corporation...
- Page 51 Back Pressure Warning C3:BACK PRES. C3:BACK PRES. output OUTPUT N.OPEN OUTPUT N.CLOSE ----- C4:NO ASSIGNED C4:NO ASSIGNED ----- C5:NO ASSIGNED C5:NO ASSIGNED ----- C6:NO ASSIGNED C6:NO ASSIGNED ----- C7:NO ASSIGNED C7:NO ASSIGNED ----- C8:NO ASSIGNED C8:NO ASSIGNED * Optional EBARA Corporation...
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Page 52: Dip Switch Setting Display
Ａ＊ Ｂ＊ ＯFF ＯFF * indicate the dip switch number (1 to 8) currently you are setting. Fig 6.5 DIP Switch [NOTE] Duration of pump operation, dip switches, except A-3 (BUZZER), can not be used for parameter setting. EBARA Corporation... - Page 53 [NOTE] If any warning or alarm occurs during the parameter setting, the setting session will be stopped automatically and the display will be changed to the warning & alarm display screen. EBARA Corporation...
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Page 54: Starting/Stopping The Pump With The Lcd Controller
Two controller connected connected The one with its LED START/STOP Allowed “LOCAL” lit on is allowed. When you use two controllers, disconnect the one which you will not use for the operation from the pump once. Then, attach it again. EBARA Corporation... -
Page 55: Operation
Unless a sufficient supply of N2 gas is maintained, serious problems will occur CAUTION such as oil back flow or pump corrosion and accretion of reaction by-products. EBARA Corporation... - Page 56 After setting the pressure, press the red stopper to lock the knob in position. In this condition, the shaft sealing N flow rate is 4.5 – 6.0 Pam3/s. (The shaft sealing N flow rate is contained in pump N flow rate currently displayed on the LCD controller.) EBARA Corporation...
- Page 57 (10) Check for correct pump operation by turning the start switch on and off a few times. To check the direction of motor rotation, allow pump to run for about 1 second. CAUTION EBARA Corporation...
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Page 58: Start/Stop
[NOTE] Do not restart the pump until 30 seconds past , after the pump was stopped. The alarm (OVERLOAD2, STEP OUT, DRIVER ALARM) may generate if the pump is restarted during the times. EBARA Corporation... -
Page 59: Local (Pump Side) Start/Stop
When the START button is pressed, "STARTFAIL" will appear on the display. b) STOP Press the STOP button on the controller. The MP and BP will stop simultaneously. The RUN lamp goes out and the display gives a current reading of 0.0A. EBARA Corporation... -
Page 60: Remote Start/Stop
When a START signal is entered, "STARTFAIL" will appear on the display. b) STOP When ALTERNATE has been selected, interrupt the external MP start signal and the pump will stop. When MOMENTARY has been selected, enter the external MP stop signal and the pump will stop. EBARA Corporation... -
Page 61: Communication Start/Stop
When ALTERNATE has been selected, interrupt the external MP start signal and the pump will stop. When MOMENTARY has been selected, enter the external MP stop signal and the pump will stop *Please see the COMMUNICATING SPECIFICATIONS in details. EBARA Corporation... -
Page 62: Maintenance And Inspection
Close nitrogen port with blank off plug. If the pump has already operated with process gases, purge the residual gases with nitrogen gas after stopping the pump operation. Then, conduct maintenance. EBARA Corporation... -
Page 63: Routine Inspection
RESET signal is entered. After you have taken the remedial action, press the RESET button on the controller or enter the RESET signal from the control signal connector to reset the WARNING. EBARA Corporation... - Page 64 If any abnormal symptoms other than those displayed on the LCD controller appear, take action in accordance with the instruction of Section 10. "Troubleshooting". When the BZ.OFF button is pressed in the BUZZER Enable mode, the buzzer will stop even during an warning status. EBARA Corporation...
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Page 65: Vacuum And Exhaust Piping
Be sure to following the instructions below when carrying out maintenance work on the vacuum and exhaust piping of the pump. Before you remove and wash the piping, be sure to purge with a sufficient volume of N2 gas. EBARA Corporation... -
Page 66: Lubricant Oil
(See Fig. 8.1.) (6) When you have drained off the waste oil close the drain hole after you have checked that there are no depositions and fragments adhering to the O-ring attached to the plug. EBARA Corporation... - Page 67 Oil filler port Oil filler port Window of the gauge Window of the gauge Oil drain port Oil drain port Oil drain port (Oil reservoir) Fig. 8.1 Oil filler port, Oil level gauge, and oil drain port positions EBARA Corporation...
- Page 68 Thus, be sure not to exceed the upper limit line when adding the oil. CAUTION When the lubrication oil level is lower than the lower limit line, serious failure may be caused. If you find out the shortage, add the oil immediately. EBARA Corporation...
- Page 69 N2 gas pressure regulator R31-200-C121 C-2250-101-0001 (EC:EBARA CORPORATION, ETI:EBARA TECHNOLOGIES INCORPORATED) Following labels are attached to pump covers. When they are hard to read for discoloring or peeling off, please stick them again as directed in the Warning Label drawings.
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Page 70: Spare (Maintenance) Parts List
Refer to Appendix 1,2 or Material Lubricant oil See section 8.4. Safety Data Sheet. CPU board. Refer to Appendix 3 or Material Lithium battery (No necessary to replace at Safety Data Sheet. usual maintenance.) O-ring Connection of vacuum line Usual industrial waste. EBARA Corporation... -
Page 71: Overhaul
(1) Fill all necessary items in a form shown in Appendix 5 and fax it in advance to Ebara Service Center or one of the agents listed in Section 11 of this manual. Ask Ebara service center for latest form. The original copy must accompany the pump you send. -
Page 72: Disconnection And Transportation
EBARA Corporation before you return the pump. Refer to Appendix 4 and 5 for the format required when customer returns their pump to Ebara service center for overhaul or rebuild. In the interest of safety during the transportation, disassembly and cleaning of the CAUTION pump be sure to take note of the gases that have been handled. - Page 73 To avoid dangers potentially encountered during pump overhauls, follow instructions shown in section 8.7, Appendix 4 or 5 to send your pump to an Ebara-designated factory for overhaul or repair. EBARA Corporation...
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Page 74: Troubleshooting
Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA Corporation... - Page 75 The dilution N2 gas control valve has Adjust the N2 flow rate as been opened too much. appropriate. **MEMORY ERROR** is None Need “Countermeasure against displayed on LCD after electric Noise” to pump. activating ELB or changing the dip switch setting EBARA Corporation...
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Page 76: Troubleshooting (2) Warning
Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA Corporation... - Page 77 (at the side of pump) After you have taken the remedial actions above, reset the pump. If the problem that has caused the WARNING signal still remains, the WARNING display will appear again even after you have reset. EBARA Corporation...
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Page 78: Troubleshooting (3) Alarm
Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA Corporation... - Page 79 Apply sufficient pressure. Root valve is closed. Open valve. Water pipe is clogged. Clean or replace piping. Tube fittings are loosened. Re-tighten. Instrument failure Replace instrument. Outlet & inlet pipes are Connect pipes correctly. reverse. (flow value 0 L/min) EBARA Corporation...
- Page 80 During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA Corporation...
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Page 81: Troubleshooting (4) Option
Connector of back pressure Connect back pressure PRESS. HIGH ##.# back pressure sensor is not connected. sensor connector. sensor Back pressure sensor failure Replace back pressure sensor. WARN: BACK Back press sensor is Instrument failure Replace instrument. PRESS broken WIRE BROKE EBARA Corporation... - Page 82 During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA Corporation...