Piping - EBARA EV-A Series Instruction Manual

4.2 Piping

4.2.1 Vacuum and outlet piping
Connect a vacuum pipe and an outlet pipe to the inlet port and the outlet port, respectively.
The inlet port of the dry pump is an NW40 quick flange, while the inlet port of this pump is an NW25
quick flange. Perform piping or make connections to different parts by using these flanges.
Because the temperatures of the inlet and outlet pipes of the pump become high, arrange them
so that they may not come in contact with the human body and combustible materials.
Adopt high corrosion-resistant materials for pipes and parts used on both inlet port and outlet
port sides.
* Use clean pipes without any foreign material for piping.
* Don't install a heavy material directly at the inlet port and the outlet port; otherwise a leak or damage
will be caused to the connecting portions.
* It is recommended to use a stainless flexible joint between the pump and a pipe.
* Take care adhering of either any dust or foreign material to the flange seal surface. And take care not
to put the scar on the flange face.
* To keep the exhausted system in a vacuum condition, install a vacuum shut-off valve between the
pump and the exhausted system.
* If there is a possibility that dust may be absorbed, install a proper scale trap or filter at the fore line of
the pump.
* Take it into consideration to allow enough conductance for piping and exhaust gas processing facilities
so that the pressure on the outlet port side (back pressure) of this pump may be 3 kPa or less.
PM10U
WARNING
CAUTION
P.23
EBARA
CORPORATION