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P.18
CAUTION For safety, be sure to use N2 gas which purity is more than
4.2.4 Ventilation Duct
All dry pumps that Ebara supplies shall go through the leakage inspection after
assembly regardless of the newly built or overhauled. Yet, in the cases where
the user-supplied line connection at the pump exhaust outlet came out or the
connection became loose due to long time pump operation while neglecting its
maintenance may allow the hazardous gases to leak from the pump module.
This pump is designed such that the process gases will not leak to environment
to the level harmful to human if the unit has been properly ventilated. This is
proven under the Tracer gas test defined in F15-93 of the SEMI standard.
Proper ventilation is necessary not only to prevent the hazardous gases to leak
but also release heat generated and accumulated in the pump module through
the pump operation. Without proper ventilation, the temperature inside the cover
will continue to rise until an ALARM is generated. This will result in serious
problems.
Connect the ventilation duct, locating on the top of the pump, to a duct that the
user provides. The user side duct shall have exhaust capability listed in Table
3.1 and shall be independent from the duct connected to the pump exhaust
outlet.
A substance, which is not corroded with used gas, shall be used as the material
of the exhaust duct.
PM10U
Front
Back
Body
Ferrule
Ferrule
Fig. 4.3 Tube Fitting Assembly
99.999%. Impurities of N2 gas may cause an accident when
the pump is used for exhausting toxic and/or inflamable
gases.
1 + 1/4
Nut
Rotation
EBARA
CORPORATION
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