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iv
（
）
WARNING To avoid any hazard induced by toxicity, flammability and
WARNING Check for gas leaks after installing and maintaining the piping.
WARNING Do not alter the pump member nor change any parts without the
WARNING The pump casing and exhaust piping become extremely hot
WARNING Check Safety Interlock functions periodically (every 6 months) to
CAUTION
CAUTION Disposal of Printed circuit board containing Lithium battery shall
PM10U
explosiveness of the process gases used in the tool, be sure to
operate the tool according to the operations safety guidelines
supplied by tool suppliers.
Appendix
6
lists
semiconductor-processing tool.
the tool gases and other concerns specific to your tool should be
directed to the respective tool suppliers.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air
into the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
EBARA's consent or approval.
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
confirm the interlocks will work correctly.
Disposal of process by-products shall be strictly in accordance
with all local and national environmental and safety regulations.
be strictly in accordance with all local and national environmental
and applicable regulations.
typical
process
gases
However, details concerning
used
in
a
EBARA
CORPORATION
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