Operation; Before Starting - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

7. Operation

(1) Turn on the cooling water supply and check that there are no leaks at the

pipe connections.

CAUTION Without sufficient cooling water, the pump temperature will rise

[ NOTE ] The pump unit itself has no cooling water flow adjustment valve.

(2) Turn on the N2 gas supply.

Check that the regulator attached to the pump is closed. (It is closed when

the pressure adjustment knob is fully turned in the counterclockwise

direction.) Open the main valve and check that there are no N2 gas leaks

from the pipe connections.

Slowly turn the pressure adjustment knob clockwise to set the pressure

(gauge pressure) to 0.1 MPa first. Then press the red stopper to lock the

knob in position.

WARNING Be sure to purge with N2 gas in order to prevent corrosion and

CAUTION Abrupt rotation of the pressure adjustment knob will cause the

CAUTION

PM10U

and problems such as rotor contact will occur.

reduce the formation/deposition of reaction by-products in the

pump. When inflammable and/or toxic gases are diluted with

N2 to the safe concentration, be sure to maintain a separate

supply of N2 gas to the pump exhaust pipe.

pressure indicator needle of the regulator to wobble and result

in an inaccurate pressure display.

Unless a sufficient supply of N2 gas is maintained, serious

problems will occur such as oil back flow or pump corrosion

and accretion of reaction by-products.

P.47

EBARA

CORPORATION

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