Advertisement
P.50
7.2 START/STOP
The toggle and DIP switches can be set at any time to select the
REMOTE/LOCAL modes and BUZZER Enabled function. Set in accordance with
the operating conditions. (See 6.3. Setting the operational mode.)
WARNING
CAUTION
CAUTION
CAUTION
[ NOTE ] It will take approx. 30 min. to reach the prescribed ultimate pressure
when pump starts under the state of cold start.
[ NOTE ] Do not exhaust the process gases until at least 30 minutes after the
pump has been started. The pump casing temperature will stabilize
after about 4 hours and it is recommended not to start exhausting the
process gases earlier than this.
PM10U
The pump and exhaust piping will remain at a high
temperature during operation and for a short time after the
pump has stopped.
Be sure to avoid contact and keep inflammable substances
out of reach.
Do not remove the outer cover during operation.
When the production process leads to react by-products in
the pump or when the process handles corrosive gases, be
sure not to stop the pump until after at least 30 minutes of
stopping the process gases.
Process gases will remain in the vacuum pipes and the pump
even after the pump has been stopped.
Be sure that therefore to purge for at least 1 hour after the
pumps has been stopped.
Do not discontinue the N2 purge when the pump is stopped
only for a short time.
The pump will remain at a very high temperature event after it
has been stopped. Be sure therefore to leave the cooling
water on for about 1 hour after the pump has been stopped.
EBARA
CORPORATION
Advertisement
Troubleshooting
