EBARA ESA200W Instruction Manual page 52

ALARM name
MP casing temp.
BP motor temp.
MP motor temp.
BP overload 1(Thermal)
MP overload 1(Thermal)
MP Current 0
BP Current 0
Power failure
BP driver protection activated (OC)
BP driver protection activated (OV)
BP driver protection activated (OH1)
BP driver protection activated (OH2)
BP driver protection activated (CPF)
BP driver protection activated (UV)
BP driver protection activated (DRE)
BP overload 2
BP step out
Low cooling water
Inner communication error (IO)
Inner communication error (BP driver)
BP current high
Exhaust temp.
BP casing temp.
Water leakage
High back pressure
Emergency stop (EMO)
External interlock
PM10U
Table 6.2 Alarm code list
Code
1st 2nd
code code
50 01
51 00
52 00
54 00
55 00
60 00
61 00
64 00
66 01
66 02
66 04
66 05
66 06
66 07
66 09
67 00
69 00
73 90
81 01
81 02
81 03
81 20
(▲) 50 02
(▲) 53 00
(▲) 63 00
(▲) 71 00
(▲) 74 00
WARNING name
Low cooling water
MP casing temp.
BP oil level low
MP oil level low
Control board inner temp.
Pump N2
BP motor temp.
MP motor temp.
BP driver case temp.
BP driver inner temp.
Inner communication error (BP driver)
Inner communication error (IO)
Inner communication error (A_IO)
Inner communication error (C_IO)
BP current high
MP current high
Exhaust temp.
BP casing temp.
High back pressure
Back pressure sensor damaged (▲)
Heater1 error
Heater1 sensor damaged
Heater2 error
Heater2 sensor damaged
Heater3 error
Heater3 sensor damaged
Heater4 error
Heater4 sensor damaged
Heater thermostat
Pump N2 Valve Error
"▲" indicates that the item is optional.
P.33
Code
1st 2nd
code code
00 01
05 01
06 00
08 00
13 00
18 00
23 00
24 00
25 02
25 04
26 02
26 03
26 04
26 07
31 14
31 15
31 20
(▲) 05 02
(▲) 21 01
(▲)
(▲)
(▲)
(▲)
(▲)
(▲)
(▲)
(▲)
(▲)
(▲)
EBARA
CORPORATION