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ESA200W
EBARA ESA200W Manuals
Manuals and User Guides for EBARA ESA200W. We have
1
EBARA ESA200W manual available for free PDF download: Instruction Manual
EBARA ESA200W Instruction Manual (92 pages)
MULTI-STAGE DRY VACUUM PUMP
Brand:
EBARA
| Category:
Water Pump
| Size: 2.18 MB
Table of Contents
Environmental Basic Policies
3
Safety Information
4
Important Prior Warnings
5
Safety Interlocks
13
Standard Limited Warranty
15
Declaration of Conformity
16
Table of Contents
17
Foreword
20
Introduction
20
Environmental Concerns
21
Product Description
22
Outline
22
Pump Module
22
N2 Gas
22
Cooling Water
23
Exhaust
23
Control System
23
Warning
23
Operation Status Control
24
The Way of Pump Moving
24
Preparation
24
Moving Method
24
Utility Disconnection
25
Electrical Power - Circuit Breaker Lockout and Tagout
25
Cooling Water
26
Nitrogen (N )
26
Returning to Service
26
Detailed Specifications
27
Specification
27
Outline Drawing
28
Performance Curve
29
System Flow
30
Installation
31
Movement and Fixation
31
Location
31
Caster and Adjustment Foot
31
Pump Fixation
32
Piping
34
Vacuum and Exhaust Piping
34
Cooling Water Piping
35
N2 Gas Piping
36
Ventilation Duct
37
Electrical Wiring
39
Grounding
39
Power Supply Wiring
40
Control Signal Wiring
41
Additional Emergency off (EMO) Input
46
Power Supply for Accessories
47
LCD Controller
48
LCD Outline
48
LCD Indication
49
Setting the Operational Mode
53
Setting the Pump Operation Control Mode
54
Setting the Pump Operation Control Mode
55
Setting the DIP Switch
55
Setting the Pump Running Mode
56
Setting the BP Normal Rotational Speed
56
Setting the Rotational Speed in the LOW SPEED Mode
56
Setting the Pump N2 Flow Low Warning Threshold
57
Setting the Dilution N2 0Mode Warning Threshold (Option)
57
Setting the Rotational Speed in the SAVE ENERGY Mode
58
Setting the WARNING Value for the Back Pressure (Option)
58
Setting the Back Pressure High Warning Threshold (Option)
59
Pump Valve Control (Option)
59
Dip Switch
60
DIP Switch Setting Display
63
Operation
66
Before Starting
66
Start/Stop
69
LOCAL Start/Stop
71
REMOTE Start/Stop
71
COMMUNICATION Start/Stop
72
Maintenance and Inspection
73
Internal Energies
73
Power Source
73
Cooling Water
73
Nitrogen Gas
73
Routine Inspection
74
Vacuum and Exhaust Piping
76
Lubricant Oil
77
Spare (Maintenance) Parts List
80
List of Wastes During Maintenance
81
Overhaul
82
Disconnection and Transportation
83
Troubleshooting
85
Troubleshooting (1) Basic Trouble
85
Troubleshooting (2) WARNING
87
Troubleshooting (3) ALARM
89
Troubleshooting (4) Option
92
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