List Of Wastes During Maintenance - EBARA ESA200W Instruction Manual

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8.6 List of wastes during maintenance

Table 8.4 lists wastes from general user maintenance. Dispose the wastes
properly according to your local waste disposal regulations in each area.
Part
Lubricant oil
Lithium battery
O-ring
PM10U
Table. 8.3 Labels
Label's Name
HAZARDOUS WEIGHT DANGER LABEL
HAZARDOUS VOLTAGE WARNING LABEL
HAZARDOUS VOLTAGE
WARNING LABEL
HIGH TEMPERATURE WARNING LABEL
HAZARDOUS MATERIAL WARNING LABEL
ANTI EARTHQUAKE
LABEL
Table 8.4 List of wastes during maintenance
Equipped on
Inside of pump module.
See section 8.4.
CPU board.
(No necessary to replace at
usual maintenance.)
Connection of vacuum line
AFTER EMO
FIXTURE WARNING
Remarks
Refer to Appendix 2 for Material
Safety Data Sheet.
Refer to Appendix 3 for Material
Safety Data Sheet.
Usual industrial waste.
Parts No.
C-7110-316-0001
C-7110-313-0001
C-7110-410-0001
C-7110-312-0001
C-7110-314-0001
C-7110-322-0001
EBARA
CORPORATION