N2 Gas Piping - EBARA ESA25-D Instruction Manual

P.18
CAUTION
CAUTION When the cooling water supply is left on while the pump is

4.2.3 N2 Gas Piping

Cut tube at right angles and make the end-face perfectly smooth. Then connect
the tube to the tube fitting assembly of the N
push-fit onto the shoulder of the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand.
After this, use a tool to tighten the nut further by 1 + 1/4 turns.
To connect the tube again after this, install the tube already fitted to the ferrule
and re-tighten the retaining nut slightly after the initial tightening (generally,
tighten by a further quarter turn after tightening by hand).
CAUTION For safety, be sure to use N2 gas which purity is more than 99.999%.
PM10U
When the cooling water connections are incorrect and the
flow is reversed, a flow rate different from the normal value will
be displayed. Pump may not be cooled properly under this
condition, and this cause serious
Be sure therefore to connect correctly to avoid problems.
stationary dew condensation will form on the water-cooled
parts in locations with high humidity.
Make it a rule therefore to stop the cooling water when water
droplets can be detected on the outer surface of the pump
cooling water piping as this suggests the possibility of dew
condensation in the pump.
Front Back
Body
Ferrule
Ferrule
Fig. 4.3 Tube Fitting Assembly
Impurities of N2 gas may cause an accident when the pump is used for
exhausting toxic and/or inflamable gases.
problem.
gas purge port. The tube is a
2
1 + 1/4
Nut
Rotation
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