Maintenance And Inspection; Internal Energies; Power Source; Cooling Water - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

P.54

8. Maintenance and Inspection

Following items show internal energies that shall be considered before start

service maintenance.

This pump is supplied with AC200V power source. Aside from the pump, the

accessory power source locating in the vicinity of the power connectors are

supplied with voltage even when the pump is completely stopped. To conduct

pump maintenance or service, be sure to turn off the breaker switch, lock it out

and then unplug the power cable. Refer to Section 3.4 in this manual for locking

out the breaker switch.

This pump is supplied with cooling water at pressure of maximum 0.4 MPa.

Disconnection of the cooling water resulted from improper handling may cause

electrification and unit damage.

cooling water connection plugs on the inlet and outlet, and seal off with plastic

cap. The self-sealing plug is used for the cooling water connection plug in these

pumps.

This pump is supplied with nitrogen gas at pressure of maximum 0.7 MPa for

diluting and sealing inside the pump. For service and transportation, close the

supply-source valve to reduce the pressure with the regulator and detach the gas

connection. Close nitrogen port with blank off plug. If the pump has already

operated with process gases, purge the residual gases with nitrogen gas after

stopping the pump operation. Then, conduct maintenance.

PM10U

For service and transportation, unplug the

EBARA

CORPORATION

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