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Troubleshooting (4) Option - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

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10.4 Troubleshooting (4) Option

WARNING Interrupt Circuit Breaker (CB) and lockout before
WARNING The pump casing and exhaust piping become extremely hot
WARNING Check for gas leaks after installing and maintaining the
Display
ALARM:
WATER LEAKAGE
ALARM:
BACK PRESS.HIGH
WARN:
PRESS. HIGH ##.#
ALARM:
EMERGENCY STOP
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the ALARM signal still remains, the ALARM display will appear
again even after you have reset.
During REMOTE operation carry out the above procedures after you have
turned off the external start signal.
When the external start signal remains on in the ALTERNATE mode, the pump
will start immediately when the RESET signal is applied.
PM10U
starting on wiring and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
piping.
Gas leaks will result in the discharge of harmful and
dangerous substances and in abnormal reactions due to the
ingress of air into the pump. When checking for gas leaks by
pressurization, please pressurize by less than 0.05 MPa into
the purge port and do check.
Symptom
Water leakage
Tube fittings are loosened.
Instrument failure
Exhaust pressure
Exhaust valve is closed.
rises.
Instrument failure
Exhaust pressure
Exhaust valve is closed.
rises.
Instrument failure
Emergency Stop
Stop by emergency Stop
switch
button.
Check Item
Re-tighten.
Replace instrument.
Check exhaust pipe.
Replace instrument.
Check exhaust pipe.
Replace instrument.
Check that pump can be
operated and turn the
button head to release
lock.
EBARA
P.73
Corrective Action
CORPORATION

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