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ESA25-D
EBARA ESA25-D Manuals
Manuals and User Guides for EBARA ESA25-D. We have
1
EBARA ESA25-D manual available for free PDF download: Instruction Manual
EBARA ESA25-D Instruction Manual (89 pages)
Multi-stage dry vacuum pump
Brand:
EBARA
| Category:
Water Pump
| Size: 1.88 MB
Table of Contents
Safety Information
4
Important Prior Warnings
5
Safety Interlocks
12
Standard Limited Warranty
14
Table of Contents
16
Foreword
19
Introduction
19
Environmental Concerns
20
Product Description
21
Outline
21
Pump Module
21
N2 Gas
21
Cooling Water
22
Exhaust
22
Control System
22
Warning
22
Operation Status Control
23
The Way of Pump Moving
23
Preparation
23
Moving Method
24
Release and Shut off Residual Internal Energy
25
Electrical Power - Lockout and Tagout
25
Cooling Water
25
Nitrogen (N2)
26
Returning to Service
26
Detailed Specifications
27
Installation
31
Movement and Fixation
31
Location
31
Caster and Adjustment Foot
31
Pump Fixation
32
Piping
34
Vacuum and Exhaust Piping
34
Cooling Water Piping
35
N2 Gas Piping
36
Ventilation Duct
37
Electrical Wiring
38
Grounding
38
Power Supply Wiring
39
Control Signal Wiring
40
Additional Emergency off (EMO) Input
45
Voltage Change
46
Method of Changing Transformer Terminal Wiring
46
Change of DIP Switch
46
Method of Changing Wiring in Motor Terminal Box
47
Method of Exchanging the Main Fuses
47
Power Supply for Accessories
48
LCD Controller
49
LCD Outline
49
LCD Indication
50
Setting the Operational Mode
54
Setting the Pump Operation Control Mode
56
Setting the DIP Switch
57
Setting the WARNING Value for N2 Flow Rate
58
Dip Switch
59
DIP Switch Setting Display
62
Starting/Stopping the Pump with the LCD Controller
64
Operation
65
Before Starting
65
Start/Stop
67
LOCAL (Pump Side) Start/Stop
68
REMOTE Start/Stop
69
COMMUNICATION Start/Stop
69
Maintenance and Inspection
70
Internal Energies
70
Power Source
70
Cooling Water
70
Nitrogen Gas
70
Routine Inspection
71
Vacuum and Exhaust Piping
73
Lubricant Oil
74
Spare (Maintenance) Parts List
77
List of Wastes During Maintenance
78
Overhaul
79
Disconnection and Transportation
80
Troubleshooting
82
Troubleshooting (1) Basic Trouble
82
Troubleshooting (2) WARNING
84
Troubleshooting (3) ALARM
86
Troubleshooting (4) Option
88
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