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Pump Fixation - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

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WARNING
CAUTION
CAUTION
(1) To fix the pump, turn the adjusters to the right to lower them.
(2) Level the pump by adjusting adjusters. Check the levelness by a put level on
the inlet flange. If you cannot check the level, you should keep a difference of
height between the both sides of the pump base less than 1mm.
The adjustment allowance is approximately 15 mm.
[ NOTE ] If the pump is not leveled, shortage of the lubrication oil supply to the
bearing may be caused.
[ NOTE ] To prevent vibrations and airborne noises, keep horizontal level of
pump with the adjustment feet.

4.1.3 Pump Fixation

The pumps are provided with casters for easy transportation and foot
adjustments for anchoring and height adjusting, as described in Section 4.1.2.
The pump, however, may unexpectedly move or fall down when an earthquake
occurs. To prevent such events, this model can be equipped with the anchor
plate to secure the pump body to the floor. Fix the pump to the floor or other firm
ground with the anchor plate at the installation.
Anchor plate is a standard part of the SEMI model. It's optional in other models.
For dimensions of the anchor plate, see the accompanying drawing.
Anchor bolts should be fit for conditions of the floor where the pump is
anchored.
PM10U
Be careful not to overturn the pump when pushing and
pulling it sideways, because the width of the pump is small
to its height.
The neck portion of the casters will vibrate during caster
movement. Be sure to keep your fingers and feet out.
Do not step on the pump or place objects on it.
P.13
EBARA
CORPORATION

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