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EBARA ESA25-D Instruction Manual
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EBARA ESA25-D Instruction Manual

Multi-stage dry vacuum pump
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INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA25-D
CE / SEMI / NRTL MODEL
200V(50Hz),200-220V(60Hz)
380-400V(50Hz),380-440V(60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
「Model ООО」 in this INSTRUCTION MANUAL is our model code.
PM40U
ISSUED BY PRECISION MACHINERY COMPANY
ESA25_CSN_D_E_Rev.0
EBARA
CORPORATION

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Summary of Contents for EBARA ESA25-D

  • Page 1 ESA25_CSN_D_E_Rev.0 INSTRUCTION MANUAL MULTI-STAGE DRY VACUUM PUMP MODEL ESA25-D CE / SEMI / NRTL MODEL 200V(50Hz),200-220V(60Hz) 380-400V(50Hz),380-440V(60Hz) Caution: Please read and understand this INSTRUCTION MANUAL thoroughly before using this equipment. Be sure to keep this INSTRUCION MANUAL on hand for future reference.
  • Page 2 Do not reproduce or reprint any portion of this manual without permission. Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations. ООО Model in this catalog is our model code. All rights reserved, copyright EBARA Corporation.
  • Page 3 Corporation, and each person will demonstrate this awareness when carrying out his or her duties. We will widely publicize these basic policies to regional societies and the general public and work to make Ebara's position on the environment clear to society in general. EBARA CORPORATION...

  • Page 4: Safety Information

    EBARA in detail. If you have any questions on pump operation, safeties, and maintenance, please do not hesitate to contact EBARA directly. Refer to Global network for contact address. Three terms designating the level of hazard are used in this manual.

  • Page 5: Important Prior Warnings

    Always work in a location with an escape route in an emergency. WARNING Do not use the pump for another process without a previous overhaul. Gases or reaction products remaining in the pump will react and lead to accidents with the formation of large amounts of products. EBARA CORPORATION PM10U...
  • Page 6 0.05 MPa into the purge port and do check. WARNING Do not alter the pump member nor change any parts without the EBARA's consent or approval. WARNING The pump casing and exhaust piping become extremely hot during operation and for some time after stopping.
  • Page 7 （ ） WARNING In designing the dry pumps, Ebara does not assume risks caused by hazardous chemical reactions resulted from simultaneous injection or mixture of multiple process gases in the pumps, and the pump is not equipped with a protection against the dangers from such pump usage.
  • Page 8 Hazardous Voltage may shock, burn, or cause death. Turn power off and lockout before servicing. WARNING 警 告 Hazardous Voltage Contact will cause injury or death by electrical shock. Disconnect line power before servicing. 危険電圧部あり。接触すると重傷または死亡の 危険があります。電源供給を止めてブレーカを切った状態で メンテナンスをして下さい。 C-7110-313-0001 EBARA CORPORATION PM10U...
  • Page 9 Raise all adjuster-feet fully when moving. DANGER 危 険 Heavy Object Can cause impact injury through falling or tipping. Use appropriate, properly rigged lifting equipment and keep from under suspended pump. Raise all adjuster feet fully when moving. 重量物。落下及び転倒により重傷または死亡の危険があります。 吊り上げたポンプの下に入らないで下さい。 移動時は全アジャスタフットを上限まであげて下さい。 C-7110-316-0001 EBARA CORPORATION PM10U...
  • Page 10 高 温 部 あ り 。 火 傷 の お そ れ が あ り ま す 。 ポ ン プ 運 転 中 及 び 停 止 後 し ば ら く の 間 は ア イ ボ ル ト 部 に 触 れ な い で 下 さ い 。 C-7110-317-0001 EBARA CORPORATION PM10U...
  • Page 11 （ ） LOCATION, WARNING LABEL1(W COVER) EBARA CORPORATION PM10U...

  • Page 12: Safety Interlocks

    The nearly instantaneous current rise from a line-to-line or line-to-ground short very rapidly opens a main fuse and interrupting power supply to the electrical panel. Manual reset, which requires clearing the fault condition, is necessary before restarting the pump. EBARA CORPORATION PM10U...
  • Page 13 （ ） Interlock Schematic EBARA CORPORATION PM10U...

  • Page 14: Standard Limited Warranty

    For overhauled pumps, the warranty period shall be six (6) months from shipment by EBARA. Coverage For the duration of the Warranty period, EBARA warrants this ESA pump from failure due to defects in materials or workmanship. For such failures, EBARA will, at its option, either...
  • Page 15 （ ） Declaration of conformity Contents EBARA CORPORATION PM10U...

  • Page 16: Table Of Contents

    3.4.3 Nitrogen (N2)..................8 3.4.4 Returning to Service ................8 3.5 Detailed Specifications ................9 4. Installation..................... 13 4.1 Movement and Fixation ................13 4.1.1 Location................... 13 4.1.2 Caster and adjustment foot ............. 13 4.1.3 Pump Fixation ................. 14 EBARA CORPORATION PM10U...
  • Page 17 7.2.2 REMOTE Start/Stop ................ 51 7.2.3 COMMUNICATION Start/Stop ............51 8. Maintenance and Inspection ................. 52 8.1 Internal energies..................52 8.1.1 Power source .................. 52 8.1.2 Cooling water .................. 52 8.1.3 Nitrogen gas ..................52 8.2 Routine Inspection.................. 53 EBARA CORPORATION PM10U...
  • Page 18 8.7 Overhaul ....................61 9. Disconnection and Transportation ..............62 10. Troubleshooting ..................64 10.1 Troubleshooting (1) Basic trouble............64 10.2 Troubleshooting (2) WARNING ............66 10.3 Troubleshooting (3) ALARM ..............68 10.4 Troubleshooting (4) option..............70 EBARA CORPORATION PM10U...

  • Page 19: Foreword

    1. Foreword We appreciate that you have selected an EBARA Model ESA25-D dry vacuum pump. This pump has been manufactured with much care and attention so that it can be operated safely and satisfactorily. Incorrect operation will result in lack of performance and cause accidents and injuries to personnel.

  • Page 20: Environmental Concerns

    WARNING If the pump becomes damaged during shipment or if parts are missing, immediately contact EBARA. If a leaking or damaged product is used, an accident resulting in injury or death could occur or the product could become further damaged.

  • Page 21: Product Description

    The nitrogen gas selector is locating on the right side of the unit, facing the LCD controller and other utility connectors. EBARA CORPORATION PM10U...

  • Page 22: Cooling Water

    The pump will continue to operate in this condition. An ALARM signal output is generated and the pump will stop automatically when the upper mechanical safety limit is reached during pump operation. EBARA CORPORATION PM10U...

  • Page 23: Operation Status Control

    Be sure to contact EBARA Corporation for details on checking the WARNING and ALARM setting conditions. • Note that the warning indications of the Model ESA25-D dry pump are different from the conventional pumps like as UERR, A, AA, AAS series, based on SEMI standard E-73.

  • Page 24: Moving Method

    / ditches and pump shall be moved on it by two persons with care. Steel Plate If pump should lose its balance when moving and start tripping over, never try to sustain the pump, get away from the pump immediately. EBARA CORPORATION PM10U...

  • Page 25: Release And Shut Off Residual Internal Energy

    Have a catchment vessel and absorbent cloths at hand before removing the couplings. 3. Make sure water outflow stops from both the facility lines and the pump. EBARA CORPORATION PM10U...

  • Page 26: Nitrogen (N2)

    6. Plug (cap) ¼” tube connector on the pump with a tube fitting cap. 3.4.4 Returning to Service 1. Unlock and open water and nitrogen valves. 2. Remove handle stop bracket and switch circuit breaker on. Restart pump and open foreline valve only after appropriate leak checks and safety verifications. EBARA CORPORATION PM10U...

  • Page 27: Detailed Specifications

    3.5 Detailed Specifications The following tables and figures should be consulted for pump specification, dimension and performance details. Table 3.1 Specification Model Model ESA25-D Pumping Speed(50/60Hz) 2500 / 3000 L/min 5.3/4.0 Ultimate Pressure(50/60Hz) Gas Inlet NW50 Connection Gas Outlet NW40 MOTOR 2P 3.7 kW...
  • Page 28 P.10 Outline Drawing ESA25-D EBARA CORPORATION PM10U...
  • Page 29 P.11 Model ESA25-D Performance Curve at 50Hz at 60Hz EBARA CORPORATION PM10U...
  • Page 30 Control Connector Noise Control Circuit Power Fuse Filter Motor Starter Fuse Pressure Gauge Gas Flow Sensor Gas Outlet Regulator Main Pump Motor Water Check (MP) Valve Cooling Water Flow Sensor Back Pressure Sensor Fig. 3.1 System Flow EBARA CORPORATION PM10U...

  • Page 31: Installation

    Four integral mobile support units consisting of a caster and a height-adjustment foot each are provided underneath the pump base. To move the pump, raise the four adjustment feet by turning the holding nuts in the counterclockwise direction. Caster Approx. Height-adjustment foot 15 mm Fig. 4.1 Caster EBARA CORPORATION PM10U...

  • Page 32: Pump Fixation

    Anchor plate is a standard part of the SEMI model. It’s optional in other models. For dimensions of the anchor plate, see the accompanying drawing. Anchor bolts should be fit for conditions of the floor where the pump is anchored. EBARA CORPORATION PM10U...
  • Page 33 P.15 (Drawing of ESA25-D) EBARA CORPORATION PM10U...

  • Page 34: Piping

    When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...

  • Page 35: Cooling Water Piping

    The cooling water will flow more or less easily according to the type of pump and the piping. Be sure to select the correct piping so as to ensure the appropriate cooling water flow rate for all pipes used. EBARA CORPORATION PM10U...

  • Page 36: N2 Gas Piping

    Fig. 4.3 Tube Fitting Assembly CAUTION For safety, be sure to use N2 gas which purity is more than 99.999%. Impurities of N2 gas may cause an accident when the pump is used for exhausting toxic and/or inflamable gases. EBARA CORPORATION PM10U...

  • Page 37: Ventilation Duct

    The exhaust noise of the pump will give rise to acoustic resonance inside the pump unit and result in an abnormal noise being generated. CAUTION Never operate the pump without pump cover for safety. EBARA CORPORATION PM10U...

  • Page 38: Electrical Wiring

    Do not modify the plug provided; if it will not fit the outlet, have the proper outlet installed by a qualified electrician. EBARA CORPORATION PM10U...

  • Page 39: Power Supply Wiring

    Ｄ Ｃ Ｂ Fig 4.4 Power Supply Receptacle (As seen from out side, just unplugged) Table 4.3 Receptacle Specification Pump model Model ESA25-D Receptacle type JL04HV-2E22-22PE-B Recep. Manufacturer Japan Aviation Electronics Industry Co., Ltd. Adapted plug type JL04V-6A22-22SE-EB Suitable wire...

  • Page 40: Control Signal Wiring

    Refer to section 4.3.4 of this manual for EMO input. Table 4.4 Receptacle Specification Connector No. Connector type 15 pin D sub-miniature Female receptacle CN-Z (in accordance with SEMI E73) CN-Y 25 pin D sub-miniature Female receptacle EBARA CORPORATION PM10U...
  • Page 41 WARNING : OPEN, Alternate ALARM STATUS (+) ALARM : OPEN, Alternate REMOTE STATUS (+) REMOTE : ON − MP START (−) RESERVED (−) MP START STATUS (−) RESERVED (−) WARNING STATUS (−) ALARM STATUS (−) REMOTE STATUS (−) EBARA CORPORATION PM10U...
  • Page 42 PUMP N WARNING STATUS (−) RESERVED (−) RESERVED (−) BACK PRESSURE ALARM STATUS (−) RESERVED (−) RESERVED (−) * : As optional ** : It can change to “Abnormality ： OPEN, Alternate “ by DIP SW. setting. EBARA CORPORATION PM10U...
  • Page 43 Table 4.7 CN-Z & CN-Y Signal Contacts Input Pump side Circuit Customer's connection Signal 12VDC 1kΩ 10mA　Min. Open Collector Dry Contact Output Pump side Circuit Signal Customer's connection 4VDC-27VDC 100mA Max. Open Collector 4VDC-27VDC ＥＭＯ 100mA Max. Dry Contact EBARA CORPORATION PM10U...
  • Page 44 (SIG./COM.) CAUTION When output signals are used to energize an inductive load such as a relay, be sure to insert a diode (100V. 1A class) in order to absorb the back electromotive force due to surge currents. EBARA CORPORATION PM10U...

  • Page 45: Additional Emergency Off (Emo) Input

    Required capacity of user side facility DC12V 20mA added by pump side. NO voltage required from outside Signal input at NORMAL condition Close between two pins of the plug Signal input at EMERGENCY condition Open between two pins of the plug EBARA CORPORATION PM10U...

  • Page 46: Voltage Change

    Connect cable "RY" to "200V" terminal. [380-400V AC at 3-phase and 50Hz, 380-440V AC at 3-phase and 60Hz] Connect cable "RY" to "400V" terminal. 4.4.2 Change of DIP switch Set the DIP-SW-C.7,8 according to operating voltage.(see Table 6.8) EBARA CORPORATION PM10U...

  • Page 47: Method Of Changing Wiring In Motor Terminal Box

    The fuse of “32A” is installed in the fuse holder of FF1, 2, and 3. [380-400V AC at 3-phase and 50Hz, 380-440V AC at 3-phase and 60Hz] The fuse of “16A” is installed in the fuse holder of FF1, 2, and 3. EBARA CORPORATION PM10U...

  • Page 48: Power Supply For Accessories

    (Shall not be used for other purposes.) ADAPTER for Central Monitoring System Interface Controller DANGER Power Supply for the options is kept applying voltage during the pump is supplied the power. WARNING Do not use the power supply for other purposes. EBARA CORPORATION PM10U...

  • Page 49: Lcd Controller

    ENTER For using at DIP switch selection And change hierarchy of screen [LED] B.P. RUN BP running (N/A) M.P. RUN MP running LOCAL LOCAL mode WARNING WARNING condition ALARM ALARM condition Fig 6.1 LCD controller EBARA CORPORATION PM10U...

  • Page 50: Lcd Indication

    Three control modes are available : “LOCAL” (local operation) , “REMOTE” (remote operation) and “COM” (Communication operation). " % " shows present number of WARNING/ALARM. Upper row "$$$$$$" distinguishes between WARNING/ALARM and indicates the position where WARNING/ALARM has occurred. Lower row "$$$$$$" displays details of WARNING/ALARM. EBARA CORPORATION PM10U...
  • Page 51 Use the Display Select Switch (▲ ▼) to change the display. The WARNINGs/ALARMs that have currently been generated can be displayed with the Display Select Switch. See Fig. 6.2 for the key operation of the pump operation status display. EBARA CORPORATION PM10U...
  • Page 52 ▽ △ Occurrence date WATER FLOW Cooling water flow ##．# L/min See Table 6.2 for the alarm codes. ▽ △ PUMPCASING Pump casing temperature ### ℃ ▽ Fig. 6.2 Key operation for the pump operation status display EBARA CORPORATION PM10U...
  • Page 53 EXT. interlock Back pressure high (▲) IO communication error Back pressure sensor damaged (▲) IO communication error(IO board) IO communication error(C_IO board) Pump N valve error MP current high “▲” indicates that the item is optional. EBARA CORPORATION PM10U...

  • Page 54: Setting The Operational Mode

    Sets the DIP switch to ON. Switches the display of the operational mode setting screen. ▼ Sets the DIP switch to OFF. Switches the display of the operational mode setting screen. ENTER Determines the selected setting. See Fig. 6.3 for how to set the operational modes. EBARA CORPORATION PM10U...
  • Page 55 • Setting the DIP switch ENTER to go to the setting DIP SW? change screen. ▲ ▼ SET POINT • Setting the WARNING value for N2 flow rate N2 WARNING? Fig. 6.3 How to set the operational mode EBARA CORPORATION PM10U...

  • Page 56: Setting The Pump Operation Control Mode

    COM MODE : Enables the communication operation (start/stop with RS232C communication) The mode that is currently not set is displayed. If you do not need to set, press PRG. key to go back to the previous screen. EBARA CORPORATION PM10U...

  • Page 57: Setting The Dip Switch

    DIP SW C？ ＰＲＧ． The up and down arrow keys, “▲” and “▼, ” turn On and OFF the DIP switch. The key BZ.OFF switches the selection from 1 to 8. See 6.4 for details of the DIP switch. EBARA CORPORATION PM10U...

  • Page 58: Setting The Warning Value For N2 Flow Rate

    “▼” : Decrease the setting value by 0.1 Pam Upper limit : 81.0 Pam Lower limit : 2.2 Pam /s(PUMP N2 LOW)/1.0 Pam /s(N2 0MODE) Factory setting : 12.0 Pam /s(PUMP N2 LOW)/7.4 Pam /s(N2 0MODE) Reset value for WARNING : Set value+1.0 Pam EBARA CORPORATION PM10U...

  • Page 59: Dip Switch

    Remote Interface (IF) Exclusive special IF No use / standard IF Operating Voltage DIP SW-A. No.1 In case of observing pump running status with RS232C communication port, Data Length can be selected out of 7bits and 8bits. EBARA CORPORATION PM10U...
  • Page 60 Then close the N gas selector valve to save N gas. Be sure always to use the N gas selector valve and dip switch-A No. 7 in combination. EBARA CORPORATION PM10U...
  • Page 61 DIP SW-C. No.3 Can be select Normal Open / Normal Close of Back Pressure ALARM. DIP SW-C. No.7,8 Set the DIP SW-C.7,8 according to operating voltage.(see Table 6.7) Table 6.7 Setting DIP SW-C.7,8 (Operating Voltage) Operating Voltage 200V 400V EBARA CORPORATION PM10U...

  • Page 62: Dip Switch Setting Display

    Ｏ FF Ｏ FF * indicate the dip switch number (1 to 8) currently you are setting. Fig 6.5 DIP Switch [NOTE] Duration of pump operation, dip switches, except A-3 (BUZZER), can not be used for parameter setting. EBARA CORPORATION PM10U...
  • Page 63 [NOTE] If any warning or alarm occurs during the parameter setting, the setting session will be stopped automatically and the display will be changed to the warning & alarm display screen. EBARA CORPORATION PM10U...

  • Page 64: Starting/Stopping The Pump With The Lcd Controller

    Two controller connected connected The one with its LED START/STOP Allowed “LOCAL” allowed. When you use two controllers, disconnect the one which you will not use for the operation from the pump once. Then, attach it again. EBARA CORPORATION PM10U...

  • Page 65: Operation

    CAUTION Unless a sufficient supply of N gas is maintained, serious problems will occur such as oil back flow or pump corrosion and accretion of reaction by-products. EBARA CORPORATION PM10U...
  • Page 66 (7) When the pump exhaust pipe is equipped with a valve, open this valve before starting the pump. CAUTION Problems will occur when the pump is operated with the valve closed as the exhaust pipe will be pressurized. EBARA CORPORATION PM10U...

  • Page 67: Start/Stop

    CAUTION When the production process leads to react by-products in the pump or when the process handles corrosive gases, be sure not to stop the pump until after at least 30 minutes of stopping the process gases. EBARA CORPORATION PM10U...

  • Page 68: Local (Pump Side) Start/Stop

    When the START button is pressed, "STARTFAIL" will appear on the display. b) STOP Press the STOP button on the controller. The pump will stop. The RUN lamp goes out and the display gives a power reading of 0.0A. EBARA CORPORATION PM10U...

  • Page 69: Remote Start/Stop

    The pump will not start when a WARNING/ALARM has been generated. When a START signal is entered, "STARTFAIL" will appear on the display. b) STOP Interrupt the external MP start command and the pump will stop. *Please refer to the COMMUNICATION SPCIFICATIONS in detail. EBARA CORPORATION PM10U...

  • Page 70: Maintenance And Inspection

    Close nitrogen port with blank off plug. If the pump has already operated with process gases, purge the residual gases with nitrogen gas after stopping the pump operation. Then, conduct maintenance. EBARA CORPORATION PM10U...

  • Page 71: Routine Inspection

    RESET signal is entered. After you have taken the remedial action, press the RESET button on the controller or enter the RESET signal from the control signal connector to reset the WARNING. EBARA CORPORATION PM10U...
  • Page 72 If any abnormal symptoms other than those displayed on the LCD controller appear, take action in accordance with the instruction of Section 10. "Troubleshooting". When the BZ.OFF button is pressed in the BUZZER Enable mode, the buzzer will stop even during an warning status. EBARA CORPORATION PM10U...

  • Page 73: Vacuum And Exhaust Piping

    Be sure to following the instructions below when carrying out maintenance work on the vacuum and exhaust piping of the pump. (1) Before you remove and wash the piping be sure to purge with a sufficient volume of N gas. EBARA CORPORATION PM10U...

  • Page 74: Lubricant Oil

    (See Figs. 8.1 and 8.2) (6) When you have drained off the waste oil close the drain hole after you have checked that there are no deposition and fragments adhering to the O-ring attached to the plug. EBARA CORPORATION PM10U...
  • Page 75 Oil filler port Oil level switch Oil drain port Oil drain port Oil drain port (Oil reservoir) Fig. 8.2 Oil filler port, oil level gauge, and oil drain port positions (See from the left-hand side to the utility) EBARA CORPORATION PM10U...
  • Page 76 Thus, be sure not to exceed the upper limit line when adding the oil. CAUTION When the lubrication oil level is lower than the lower limit line, serious failure may be caused. If you find out the shortage, add the oil immediately. EBARA CORPORATION PM10U...

  • Page 77: Spare (Maintenance) Parts List

    Thermo couple sensor bolt T TYPE, M8 C-1019-121-0001 R31-200-C121 C-2250-101-0001 gas pressure regulator 660GH-32UL-F C-5314-097-0001 Fuse (200V) 660GH-16UL-F C-5314-095-0001 Fuse (400V) FLQ1 C-5314-094-0001 Fuse (Primary transformer) UXM250V1A C-5500-000-3500 Fuse (Secondary transformer) ----- C-5550-007-5600 ZNR Harness EBARA CORPORATION PM10U...

  • Page 78: List Of Wastes During Maintenance

    Refer to Appendix 1,2 for Material Lubricant oil See section 8.4. Safety Data Sheet. CPU board. Refer to Appendix 3 for Material Lithium battery (No necessary to replace at Safety Data Sheet. usual maintenance.) O-ring Connection of vacuum line Usual industrial waste. EBARA CORPORATION PM10U...

  • Page 79: Overhaul

    (1) Fill all necessary items in a form shown in Appendix 5 and fax it in advance to Ebara Service Center or one of the agents listed in Section 11 of this manual. Ask Ebara service center for latest form. The original copy must accompany the pump you send.

  • Page 80: Disconnection And Transportation

    EBARA Corporation before you return the pump. Refer to Appendix 4 or 5 for the format required when customer returns their pump to Ebara service center for overhaul or rebuild. CAUTION In the interest of safety during the transportation, disassembly and cleaning of the pump, be sure to take note of the gases that have been handled.
  • Page 81 To avoid dangers potentially encountered during pump overhauls, follow instructions shown in section 8.7, Appendix 4 or 5 to send your pump to an Ebara-designated factory for overhaul or repair. EBARA CORPORATION PM10U...

  • Page 82: Troubleshooting

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 83 Replace or overhaul pump. **MEMORY ERROR** is None Need “Countermeasure against displayed on LCD electric Noise” to pump. changing the dip switch setting **WATCH DOG TIMER None Need “Countermeasure against ERROR** is displayed on electric Noise” to pump. LCD. EBARA CORPORATION PM10U...

  • Page 84: Troubleshooting (2) Warning

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 85 (at the side of pump) After you have taken the remedial actions above, reset the pump. If the problem that has caused the WARNING signal still remains, the WARNING display will appear again even after you have reset. EBARA CORPORATION PM10U...

  • Page 86: Troubleshooting (3) Alarm

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 87 During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA CORPORATION PM10U...

  • Page 88: Troubleshooting (4) Option

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 89 During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA CORPORATION PM10U...