Cooling Water; Nitrogen (N ); Returning To Service - EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump

Breaker

3.4.2 Cooling water

1. Close [facility] water supply to stop water supply to the pump, then close water

return valve. Follow [facility] procedures for locking these valves in the off

position.

2. Push the knurled outer ring of the quick-connect couplers toward the pump to

disconnect the water hoses. Carefully remove the male coupling halves from

the hoses and remake the quick-connects to drain the pump lines. Have a

catchments vessel and absorbent cloths at hand before removing the couplings.

3. Make sure water outflow stops from both the facility lines and the pump.

3.4.3 Nitrogen (N

1. Close [facility] nitrogen supply valve and follow facility procedures for locking

this valve in the off position.

2. Verify that the nitrogen pressure gauge (on front panel of the pump) drops to 0

MPa, confirming that no pressurized gas energy is stored in the pump.

3. Pull out the red detent ring on the N2 regulator.

4. Turn knob counterclockwise until pressure gauge reads 0 MPa. (Both N2

regulator knob and nitrogen pressure gauge are located on front panel of the

pump.)

5. Disconnect tube connection of N2 supply line by turning tube nut

counterclockwise.

6. Plug (cap) ¼" tube connector on the pump with a tube fitting cap.

1. Unlock and open water and nitrogen valves.

2. Remove handle stop bracket and switch circuit breaker on.

3. Restart pump and open foreline valve only after appropriate leak checks and

safety verifications.

PM10U

Lockout device

)

Shackle diameter shall be 5mm or less.

Padlock

EBARA

P.7

CORPORATION

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