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EBARA ESA200W Instruction Manual
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EBARA ESA200W Instruction Manual

EBARA ESA200W Instruction Manual

Multi-stage dry vacuum pump
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INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA200W
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
「Model ООО」 in this INSTRUCTION MANUAL is our model code
PM40U
ISSUED BY PRECISION MACHINERY COMPANY
ESA200_CSN_2_E_Rev. 0
EBARA
CORPORATION

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Summary of Contents for EBARA ESA200W

  • Page 1 ESA200_CSN_2_E_Rev. 0 INSTRUCTION MANUAL MULTI-STAGE DRY VACUUM PUMP MODEL ESA200W CE / SEMI / NRTL MODEL 200-220V(50/60Hz) Caution: Please read and understand this INSTRUCTION MANUAL thoroughly before using this equipment. Be sure to keep this INSTRUCION MANUAL on hand for future...
  • Page 2 Do not reproduce or reprint any portion of this manual without permission. Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations. Model ○○○ in this catalog is our model code. All rights reserved, copyright EBARA Corporation.

  • Page 3: Environmental Basic Policies

    Corporation, and each person will demonstrate this awareness when carrying out his or her duties. We will widely publicize these basic policies to regional societies and the general public and work to make Ebara's position on the environment clear to society in general. EBARA CORPORATION...

  • Page 4: Safety Information

    EBARA in detail. If you have any questions on pump operation, safeties, and maintenance, please do not hesitate to contact EBARA directly. Refer to Global network for contact address. Three terms designating the level of hazard are used in this manual.

  • Page 5: Important Prior Warnings

    Always work in a location with an escape route in an emergency. WARNING Do not use the pump for another process without a previous overhaul. Gases or reaction products remaining in the pump will react and lead to accidents with the formation of large amounts of products. EBARA CORPORATION PM10U...
  • Page 6 0.05 MPa into the purge port and do check. WARNING Do not alter the pump member nor change any parts without the EBARA's consent or approval. WARNING The pump casing and exhaust piping become extremely hot during operation and for some time after stopping.
  • Page 7 （ ） WARNING In designing the dry pumps, Ebara does not assume risks caused by hazardous chemical reactions resulted from simultaneous injection or mixture of multiple process gases in the pumps, and the pump is not equipped with a protection against the dangers from such pump usage.
  • Page 8 Hazardous Voltage may shock, burn, or cause death. Turn power off and lockout before servicing. WARNING 警 告 Hazardous Voltage Contact will cause injury or death by electrical shock. Disconnect line power before servicing. 危険電圧部あり。接触すると重傷または死亡の 危険があります。電源供給を止めてブレーカを切った状態で メンテナンスをして下さい。 C-7110-313-0001 EBARA CORPORATION PM10U...
  • Page 9 Contact will cause injury or death by electrical shock. Disconnect line power before servicing. 危険電圧部あり。接触すると重傷または死亡の 危険があります。電源供給を止めてブレーカを切った状態で メンテナンスをして下さい。 WARNING 警 告 Hazardous Voltage Contact will cause injury or death by electrical shock. Connector CN-C remains energized after EMO. 危険電圧部あり。接触すると重傷または死亡の 危険があります。コネクタCN-CはEMO作業後も 通電しています。　　　　　　　　　　　　　C-7110-410-0001 EBARA CORPORATION PM10U...
  • Page 10 地 震 発 生 時 に ポ ン プ が 転 倒 す る 恐 れ が あ り ま す 。 固 定 金 具 で ポ ン プ を 床 面 等 に 固 定 し て 下 さ い 。 C-7110-322-0001 EBARA CORPORATION PM10U...
  • Page 11 （ ） EBARA CORPORATION PM10U...
  • Page 12 （ ） EBARA CORPORATION PM10U...

  • Page 13: Safety Interlocks

    Manual reset, which requires clearing the fault condition, is necessary before restarting the pump. The circuit breaker also serves as a lockable interrupt device for servicing the pump system. EBARA CORPORATION PM10U...
  • Page 14 （ ） Interlock Schematic for ESA200W EBARA CORPORATION PM10U...

  • Page 15: Standard Limited Warranty

    For overhauled pumps, the warranty period shall be six (6) months from shipment by EBARA. Coverage For the duration of the Warranty period, EBARA warrants this ESA pump from failure due to defects in materials or workmanship. For such failures, EBARA will, at its option, either...

  • Page 16: Declaration Of Conformity

    （ ） Declaration of Conformity EBARA CORPORATION PM10U...

  • Page 17: Table Of Contents

    3.4.2 Cooling water ................7 3.4.3 Nitrogen (N ) ..................7 3.4.4 Returning to Service ..............7 3.5 Detailed Specifications................ 8 Specification .....................8 Outline Drawing..................9 Performance Curve ................10 System Flow ................... 11 4. Installation ....................12 4.1 Movement and Fixation ..............12 EBARA CORPORATION PM10U...
  • Page 18 6.4 Dip Switch................... 41 6.5 DIP Switch setting display ..............44 7. Operation ....................47 7.1 Before Starting ................... 47 7.2 START/STOP ..................50 7.2.1 LOCAL Start/Stop ............... 52 7.2.2 REMOTE Start/Stop ..............52 7.2.3 COMMUNICATION Start/Stop ............ 53 EBARA CORPORATION PM10U...
  • Page 19 8.7 Overhaul ..................... 63 9. Disconnection and Transportation ............64 10. Troubleshooting ..................66 10.1 Troubleshooting (1) Basic trouble ..........66 10.2 Troubleshooting (2) WARNING ............ 68 10.3 Troubleshooting (3) ALARM ............70 10.4 Troubleshooting (4) Option ............73 EBARA CORPORATION PM10U...

  • Page 20: Foreword

    1. Foreword We appreciate that you have selected an EBARA dry vacuum pump ESA200W. This pump has been manufactured with much care and attention so that it can be operated safely and satisfactorily. Incorrect operation will result in lack of performance and cause accidents and injuries to personnel.

  • Page 21: Environmental Concerns

    WARNING If the pump becomes damaged during shipment or if parts are missing, immediately contact EBARA. If a leaking or damaged product is used, an accident resulting in injury or death could occur or the product could become further damaged.

  • Page 22: Product Description

    The correct amount of N2 gas is supplied for those two types of purge operation, by adjusting the regulation pressure to the specified value. The nitrogen gas selector is locating on the right side of the unit, facing the LCD controller and other utility connectors. It is under the outer cover. EBARA CORPORATION PM10U...

  • Page 23: Cooling Water

    WARNING signal will be generated to ensure that the plant operation is not discontinued. This enables the operator to check the pump after the equivalent of one cycle has been completed. Be sure to contact EBARA Corporation for details on checking the WARNING and ALARM setting conditions. EBARA...

  • Page 24: Operation Status Control

    If pump needs to be moved on steps or ditches, spread steel plate or the like which can sustain the pump weight over the steps / ditches and pump shall be moved on it by two persons with care. EBARA CORPORATION PM10U...

  • Page 25: Utility Disconnection

    6. If unable to confirm interruption of power via LCD display, use a voltmeter to probe contacts at Connector CN-C. Potential between any two pins indicates that electrical power to the pump is not interrupted. 7. The Lockout/Tagout procedures must comply with OSHA 29 CFR 1910.147 and 1910.331-335 EBARA CORPORATION PM10U...

  • Page 26: Cooling Water

    3.4.4 Returning to Service 1. Unlock and open water and nitrogen valves. 2. Remove handle stop bracket and switch circuit breaker on. 3. Restart pump and open foreline valve only after appropriate leak checks and safety verifications. EBARA CORPORATION PM10U...

  • Page 27: Detailed Specifications

    3.5 Detailed Specifications The following tables and figures should be consulted for pump specification, dimension and performance details. Table 3.1 Specification Model Model ESA200W Pumping Speed 20000 L/min Ultimate Pressure 0.53 Pa Gas Inlet NW80 Connection Gas Outlet NW40 Approx. Power at Ultimate Pressure 3.2kW ;...

  • Page 28: Outline Drawing

    Outline Drawing EBARA CORPORATION PM10U...

  • Page 29: Performance Curve

    P.10 Performance Curve EBARA CORPORATION PM10U...

  • Page 30: System Flow

    Pressure Gauge Pump N2 Gas Flow Sensor Silencer N2 Gas N2 Selector Valve Regulator Driver 2 Booster Pump Motor 2 （ＢＰ） Water Main Pump Motor 1 （ＭＰ） Check Valve Cooling Water Flow Sensor Fig. 3.2 System Flow EBARA CORPORATION PM10U...

  • Page 31: Installation

    Four integral mobile support units consisting of a caster and a height-adjustment foot each are provided underneath the pump base. To move the pump, raise the four adjustment feet by turning the holding nuts in the counterclockwise direction. Caster Adjuster (Vibroisolating rubber) Approx 15mm Fig. 4.1 Caster EBARA CORPORATION PM10U...

  • Page 32: Pump Fixation

    Anchor plate is a standard part of the SEMI model. It’s optional in other models. For dimensions of the anchor plate, see the accompanying drawing. Anchor bolts should be fit for conditions of the floor where the pump is anchored. EBARA CORPORATION PM10U...
  • Page 33 P.14 EBARA CORPORATION PM10U...

  • Page 34: Piping

    When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...

  • Page 35: Cooling Water Piping

    The material selected for the water piping of facility side should have a heat resistance so that it can withstand a maximum temperature of at least 70℃ at the operating pressure. EBARA CORPORATION PM10U...

  • Page 36: N2 Gas Piping

    After this, use a tool to tighten the nut further by 1 + 1/4 turns. To connect the tube again after this, install the tube already fitted to the ferrule and re-tighten the retaining nut slightly after the initial tightening (generally, tighten by a further quarter turn after tightening by hand). EBARA CORPORATION PM10U...

  • Page 37: Ventilation Duct

    4.2.4 Ventilation Duct All dry pumps that Ebara supplies shall go through the leakage inspection after assembly regardless of the newly built or overhauled. Yet, in the cases where the user-supplied line connection at the pump exhaust outlet came out or the connection became loose due to long time pump operation while neglecting its maintenance may allow the hazardous gases to leak from the pump module.
  • Page 38 The exhaust noise of the pump will give rise to acoustic resonance inside the pump unit and result in an abnormal noise being generated. CAUTION Never operate the pump without pump cover for safety. EBARA CORPORATION PM10U...

  • Page 39: Electrical Wiring

    Do not modify the plug provided; if it will not fit the outlet, have the proper outlet installed by a qualified electrician. EBARA CORPORATION PM10U...

  • Page 40: Power Supply Wiring

    Phase Ｄ Ｃ Ｂ Fig. 4.4 Power Supply Receptacle (As seen from outside,just unplugged) Table 4.3 Receptacle Specification Pump model Model ESA200W Receptacle type JL04HV-2E22-22PE-B Recep. Manufacturer Japan Aviation Electronics Industry Co., Ltd. Adapted plug type JL04V-6A22-22SE-EB Suitable wire AWG #8 (UL1283) Power capacity kVA 12.0...

  • Page 41: Control Signal Wiring

    Refer to section 4.3.4 of this manual for EMO input. Table 4.4 Receptacle Specification Connector No. Connector type 15 pin D sub-miniature Female receptacle CN-Z (In accordance with SEMI E73) CN-Y 25 pin D sub-miniature Female receptacle EBARA CORPORATION PM10U...
  • Page 42 ALARM STATUS (+) ALARM ： OPEN, Alternate REMOTE STATUS (+) REMOTE ： CLOSE − MP START (−) BP START (−) MP START STATUS (−) BP START STATUS (−) WARNING STATUS (−) ALARM STATUS (−) REMOTE STATUS (−) EBARA CORPORATION PM10U...
  • Page 43 RESERVED (−) EMO STATUS (−) PUMP N2 WARNING STATUS (−) RESERVED (−) SAVING ENERGY STATUS (−) RESERVED (−) RESERVED (−) RESERVED (−) ※ 1 It can change to “Abnormality ： OPEN, Alternate “ by DIP SW. setting. EBARA CORPORATION PM10U...
  • Page 44 Table 4.7 CN-Z & CN-Y Signal Contacts Input Pump side Circuit Customer's connection Signal 12VDC 1kΩ 10mA　Min. Open Collector Dry Contact Output Pump side Circuit Customer's connection Signal 4VDC-27VDC 100mA Max. Open Collector 4VDC-27VDC ＥＭＯ 100mA Max. Dry Contact EBARA CORPORATION PM10U...
  • Page 45 CAUTION Be sure to wire all signals with the correct polarity(SIG./COM.) CAUTION When output signals are used to energize an inductive load such as a relay, be sure to insert a diode (100V. 1A class) in order to absorb the back electromotive force due to surge currents. EBARA CORPORATION PM10U...

  • Page 46: Additional Emergency Off (Emo) Input

    Required capacity of user side facility DC12V 20mA added by pump side. NO voltage required from outside Signal input at NORMAL condition Close between two pins of the plug Signal input at EMERGENCY condition Open between two pins of the plug EBARA CORPORATION PM10U...

  • Page 47: Power Supply For Accessories

    ADAPTER for Central Monitoring System Interface Controller DANGER Power Supply for the options is kept applying voltage when Circuit Breaker (CB) turns on during the pump is supplied the power. WARNING Do not use the power supply for other purposes. EBARA CORPORATION PM10U...

  • Page 48: Lcd Controller

    ENTER For using at DIP switch selection And change hierarchy of screen [LED] B.P. RUN BP running M.P. RUN MP running LOCAL LOCAL mode WARNING WARNING condition ALARM ALARM condition Fig. 6.1 LCD controller EBARA CORPORATION PM10U...

  • Page 49: Lcd Indication

    ° C Motor speed S P E E D WARNING/ALARM $ $ $ $ $ : $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ EBARA CORPORATION PM10U...
  • Page 50 Use the Display Select Switch (△ ▽) to change the display. The WARNINGs/ALARMs that have currently been generated can be displayed with the Display Select Switch. See Fig. 6.2 for the key operation of the pump operation status display. EBARA CORPORATION PM10U...
  • Page 51 ▽ △ See Table 6.2 for the alarm codes. Pump casing temperature CASING TEMP． ### °C ▽ △ Motor speed BP SPEED Fig. 6.2 Key operation for the pump operation status # ．# k min-1 display screen EBARA CORPORATION PM10U...
  • Page 52 (▲) Heater3 error (▲) Emergency stop (EMO) (▲) Heater3 sensor damaged (▲) External interlock (▲) Heater4 error (▲) Heater4 sensor damaged (▲) Heater thermostat (▲) Pump N2 Valve Error (▲) “▲” indicates that the item is optional. EBARA CORPORATION PM10U...

  • Page 53: Setting The Operational Mode

    Sets the DIP switch to ON. Switches the display of the operational mode setting screen. ▽ Sets the DIP switch to OFF. Switches the display of the operational mode setting screen. ENTER Determines the selected setting. See Fig. 6.3 for how to set the operational modes. EBARA CORPORATION PM10U...

  • Page 54: Setting The Pump Operation Control Mode

    Setting the pump N2 flow low warning threshold • PUMP △ ▽ SET POINT Setting the Back Pressure high warning threshold • BACK PRESSURE? (option) △ ▽ Pump Valve Control (option) • VALVE CONTROL? Fig. 6.3 How to set the operational mode EBARA CORPORATION PM10U...

  • Page 55: Setting The Pump Operation Control Mode

    The up and down arrow keys, “ △ ” and “ ▽ , ＰＲＧ． ” turn On and OFF the DIP switch. The key BZ.OFF switches the selection from 1 to 8. See Section 6.4 for details of the DIP switch. EBARA CORPORATION PM10U...

  • Page 56: Setting The Pump Running Mode

    △ : Increase the setting speed by 0.1 kmin ▽ : Decrease the setting speed by 0.1 kmin Upper limit BP : The value lower than the set value for the normal speed Lower limit BP : 1.0 kmin EBARA CORPORATION PM10U...

  • Page 57: Setting The Pump N2 Flow Low Warning Threshold

    ： Increase the setting speed by 0.1 Pam /s (Delay time：1 sec) ： Decrease the setting speed by 0.1 Pam /s (Delay time：1 sec) ▽ Upper limit 81.0 Pam /s (Delay time：60 sec) Lower limit 7.4 Pam /s (Delay time：5 sec) EBARA CORPORATION PM10U...

  • Page 58: Setting The Rotational Speed In The Save Energy Mode

    : Increase the setting value by 0.5 kPa. △ : Decrease the setting value by 0.5 kPa. ▽ Upper limit : 30.0 kPa Lower limit : 5.0 kPa Factory setting : 20.0 kPa WARNING reset value : Set value –2.0 kPa EBARA CORPORATION PM10U...

  • Page 59: Setting The Back Pressure High Warning Threshold (Option)

    ・A valve is made to CLOSE at the time of a power supply injection. （The last valve state is not memorized.） 3.Display on LCD ・In the case of under pump operation, and in the case of Valve CLOSE, INLET VALVE is displayed on a Normal display mode. CLOSED EBARA CORPORATION PM10U...

  • Page 60: Dip Switch

    The output of a valve state * Not used Used ------- ------- ------- ------- * Optional DIP SW-A. No.1 In case of observing pump running status with RS232C communication port, Data Length can be selected out of 7bits and 8bits. EBARA CORPORATION PM10U...
  • Page 61 Then close the N2 gas selector valve to save N2 gas. Be sure always to use the N2 gas selector valve and dip switch-A No. 7 in combination. EBARA CORPORATION PM10U...
  • Page 62 "NORMAL CLOSE" for Backpressure WARNING output. DIP SW-C. No.6 This switch allows you to select enable or disable the pump valve control. DIP SW-C. No.7 This switch allows you to select enable or disable the output of pump valve control status. EBARA CORPORATION PM10U...

  • Page 63: Dip Switch Setting Display

    * indicate the dip switch number (1 to 8) currently you are setting. Fig 6.5 DIP Switch [NOTE] Duration of pump operation, dip switches, except A-3 (BUZZER) and B-8 (LCD initialize), can not be used for parameter setting. EBARA CORPORATION PM10U...
  • Page 64 [NOTE] If any warning or alarm occurs during the parameter setting, the setting session will be stopped automatically and the display will be changed to the warning & alarm display screen. EBARA CORPORATION PM10U...
  • Page 65 The one with its LED START/STOP Allowed “LOCAL” lit on is allowed. When you use two controllers, disconnect the one which you will not use for the operation from the pump once. Then, attach it again. EBARA CORPORATION PM10U...

  • Page 66: Operation

    CAUTION Unless a sufficient supply of N2 gas is maintained, serious problems will occur such as oil back flow or pump corrosion and accretion of reaction by-products. EBARA CORPORATION PM10U...
  • Page 67 After setting the pressure, press the red stopper to lock the knob in position. In this condition, the shaft sealing N2 flow rate is 4.6 - 6Pam (The shaft sealing N2 flow rate is contained in pump N2 flow rate currently displayed on the LCD controller.) EBARA CORPORATION PM10U...
  • Page 68 (8) When the pump exhaust pipe is equipped with a valve, open this valve before starting the pump. CAUTION Problems will occur when the pump is operated with the valve closed as the exhaust pipe will be pressurized. EBARA CORPORATION PM10U...

  • Page 69: Start/Stop

    [ NOTE ] Do not exhaust the process gases until at least 30 minutes after the pump has been started. The pump casing temperature will stabilize after about 4 hours and it is recommended not to start exhausting the process gases earlier than this. EBARA CORPORATION PM10U...
  • Page 70 When DIP switch-A No. 4 is placed into the ON position and the toggle switch is changed from the LOCAL to the REMOTE setting the pump will stop regardless of the external signal input. EBARA CORPORATION PM10U...

  • Page 71: Local Start/Stop

    [ NOTE ] The pump will not start when a WARNING/ALARM has been generated. When a START signal is entered, "STARTFAIL" will appear on the display. b) STOP Interrupt the external MP start signal and the pump will stop. EBARA CORPORATION PM10U...

  • Page 72: Communication Start/Stop

    The pump will not start when an WARNING/ALARM has been generated. When a START signal is entered, "STARTFAIL" will appear on the display. b) STOP Input the MP stop command from the RS232C communication connector. The pump will stop. Please refer to Communicating Specifications EBARA CORPORATION PM10U...

  • Page 73: Maintenance And Inspection

    Close nitrogen port with blank off plug. If the pump has already operated with process gases, purge the residual gases with nitrogen gas after stopping the pump operation. Then, conduct maintenance. EBARA CORPORATION PM10U...

  • Page 74: Routine Inspection

    The pump and exhaust piping will remain at a high temperature during operation and for a short time after the pump has stopped. Be sure to avoid contact and keep inflammable substances out of reach. Do not remove the outer cover during operation. EBARA CORPORATION PM10U...
  • Page 75 If any abnormal symptoms other than those displayed on the LCD controller appear, take action in accordance with the instruction of Section 10. "Troubleshooting". When the "BZ.OFF" button is pressed in the BUZZER Enable mode, the buzzer will stop even during an warning status. EBARA CORPORATION PM10U...

  • Page 76: Vacuum And Exhaust Piping

    Be sure to following the instructions below when carrying out maintenance work on the vacuum and exhaust piping of the pump. (1) Before you remove and wash the piping be sure to purge with a sufficient volume of N2 gas. EBARA CORPORATION PM10U...

  • Page 77: Lubricant Oil

    Follow the steps below to supply oil. (1) Stop the pump and remove the outer side cover on the pump. (See Fig. 8.1) Fig. 8.1 How to remove pump covers EBARA CORPORATION PM10U...
  • Page 78 Oil drain port Oil drain port Oil level gauge Oil drain port Oil drain port Oil drain port Oil drain (Oil reservoir) (Oil reservoir) port Fig. 8.2 Oil filler inlet, oil level gauge, and oil drain port positions EBARA CORPORATION PM10U...
  • Page 79 （Except Booster pump gear side.） CAUTION When the lubrication oil level is lower than the lower limit line, serious failure may be caused. If you find out the shortage, add the oil immediately. EBARA CORPORATION PM10U...

  • Page 80: Spare (Maintenance) Parts List

    Control Panel ESAG2200E － BP Motor Driver IMDGA200 A-2017-224-0001 LCD Controller REMG4 C-5114-317-0001 Following labels are attached to pump covers. When they are hard to read for discoloring or peeling off, please stick them again as directed. EBARA CORPORATION PM10U...

  • Page 81: List Of Wastes During Maintenance

    Refer to Appendix 2 for Material Lubricant oil See section 8.4. Safety Data Sheet. CPU board. Refer to Appendix 3 for Material Lithium battery (No necessary to replace at Safety Data Sheet. usual maintenance.) O-ring Connection of vacuum line Usual industrial waste. EBARA CORPORATION PM10U...

  • Page 82: Overhaul

    (1) Fill all necessary items in a form shown in Appendix 5 and fax it in advance to Ebara Service Center or one of the agents listed in Global network for contact address. Ask Ebara service center for latest form. The original copy must accompany the pump you send.

  • Page 83: Disconnection And Transportation

    EBARA Corporation before you return the pump. Refer to Appendix 4 and 5 or the format required when customer returns their pump to Ebara service center for overhaul or rebuild CAUTION...
  • Page 84 To avoid dangers potentially encountered during pump overhauls, follow instructions shown in Section 8.7, Appendix 4 or 5 to send your pump to an Ebara-designated factory for overhaul or repair. EBARA CORPORATION PM10U...

  • Page 85: Troubleshooting

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 86 Leak from vacuum piping. Check piping. Accumulation of by-products in pumps. Replace or overhaul pump. **MEMORY ERROR** is None Need “Countermeasure against displayed on LCD after electric Noise” to pump. activating ELB or changing the dip switch setting EBARA CORPORATION PM10U...

  • Page 87: Troubleshooting (2) Warning

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 88 Increase cooling water flow. reduced. After you have taken the remedial actions above, reset the pump. If the problem that has caused the WARNING signal still remains, the WARNING display will appear again even after you have reset. EBARA CORPORATION PM10U...

  • Page 89: Troubleshooting (3) Alarm

    Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
  • Page 90 Can not restart Rotor makes contact. (Accumulation of Replace or overhaul by-products) pump. (Substance plunge) Instrument failure Replace instrument. ALARM :MP MOTOR MP motor current Instruments are in failure. Replace instruments. NO CURRENT value is 0. EBARA CORPORATION PM10U...
  • Page 91 During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA CORPORATION PM10U...

  • Page 92: Troubleshooting (4) Option

    During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA CORPORATION PM10U...