Piping; Vacuum And Exhaust Piping; Gas Ballast Piping - EBARA EV-PA 250 Instruction Manual

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3.2 Piping

3.2.1 Vacuum and Exhaust Piping

Heed the following cautions when connect the vacuum and exhaust pipes to the suction and exhaust
flanges.
The ingress of foreign objects into the pump interior will prevent the pump from operating because a
narrow clearance is not maintained in the pump
a) Remove all foreign matter from inside the piping.
b) Comfirm that no dirt or dust particles adhere to the flange surfaces and/or that the flange
surfaces are damaged when connectiong. Provide a suitable means of preventing the ingress
of reaction by-products adhering to the pipes and wafer fragments. For this purpose, a filter
may be installed.
c) The weight of the pipes attached to the pump can cause misalignment and leaks from the flange
connections. Be sure therefore to support the piping properly and not to apply undue force when
aligning the flange faces. To reduce the transmission of vibration, it is recommended to insert
flexible bellows when connecting the pipes to the suction and exhaust flanges of the pump.
The length of the flexible bellows on the vacuum (suction) side will vary according to the vacuum
drawn. Be sure to connect so that no undue force can be applied to the flexible bellows.
d) Decide a part to connect to the pump exhaust so that the exhaust pressure is not beyond
atmospheric pressure.
!
Check for leaks after you have installed the pump.
(Apply a pressure of 0.05 MPa or less for a leak check with pressurization.)
!
Confirm the pump dose not come in contact with humans or inflammable substances. Do
not remove the pump cover during operation.
The pump casing, inlet piping and exhaust piping become extremely hot during operation
and for some time after stopping.
!
The exhaust piping made by polyvinyl chloride causes the noise thrugh the pipe.

3.2.2 Gas ballast Piping

When the gas ballast is supplied with pressurized gas, install regulator at the gas ballast port which is
the connection type G1/8 Female. And adjust the supply pressure to 0.05MPa (Guage) pressure or less
to set the gas ballast flow rate to 8.4Pam3/s.
PM10U
WARNING
WARNING
CAUTION
EBARA
CORPORATION