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ESA500_STD_B_E_Rev.0 INSTRUCTION MANUAL MULTI-STAGE DRY VACUUM PUMP MODEL ESA500W STANDARD MODEL 200V(50Hz), 200-220V(60Hz) 440V(50Hz), 400-480V(60Hz) Caution: Please read and understand this INSTRUCTION MANUAL thoroughly before using this equipment. Be sure to keep this INSTRUCION MANUAL on hand for future reference...
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Do not reproduce or reprint any portion of this manual without permission. Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations. Model OOO in this catalog is our model code. All rights reserved, copyright EBARA Corporation.
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Corporation, and each person will demonstrate this awareness when carrying out his or her duties. We will widely publicize these basic policies to regional societies and the general public and work to make Ebara's position on the environment clear to society in general. EBARA CORPORATION...
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EBARA in detail. If you have any questions on pump operation, safeties, and maintenance, please do not hesitate to contact EBARA directly. Refer to Global network for contact address. Three terms designating the level of hazard are used in this manual.
Gases or reaction products remaining in the pump will react and lead to accidents with the formation of large amounts of products. WARNING Pump oil may be contaminated with process byproducts. Treat it as a hazardous waste. See Table 3.1 for oil quantities. EBARA CORPORATION PM10U...
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0.05 MPa into the purge port and do check. WARNING Do not alter the pump member nor change any parts without the EBARA's consent or approval. WARNING The pump casing and exhaust piping become extremely hot during operation and for some time after stopping.
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( ) WARNING In designing the dry pumps, Ebara does not assume risks caused by hazardous chemical reactions resulted from simultaneous injection or mixture of multiple process gases in the pumps, and the pump is not equipped with a protection against the dangers from such pump usage.
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Hazardous Voltage may shock, burn, or cause death. Turn power off and lockout before servicing. 警 告 WARNIN Hazardous Voltage Contact will cause injury or death by electrical shock. Disconnect line power before servicing. 危険電圧部あり。接触すると重傷または死亡の 危険があります。電源供給を止めてブレーカを切った状態で メンテナンスをして下さい。 C-7110-313-0001 EBARA CORPORATION PM10U...
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Raise all adjuster-feet fully when moving. 危 険 Heavy Object Can cause impact injury through falling or tipping. Use appropriate, properly rigged lifting equipment and keep from under suspended pump. Raise all adjuster feet fully when moving. 重量物。落下及び転倒により重傷または死亡の危険があります。 吊り上げたポンプの下に入らないで下さい。 移動時は全アジャスタフットを上限まであげて下さい。 C-7110-316-0001 EBARA CORPORATION PM10U...
For overhauled pumps, the warranty period shall be six (6) months from shipment by EBARA. Coverage For the duration of the Warranty period, EBARA warrants this ESA pump from failure due to defects in materials or workmanship. For such failures, EBARA will, at its option, either...
1. Foreword We appreciate that you have selected an EBARA dry vacuum pump model ESA500W. This pump has been manufactured with much care and attention so that it can be operated safely and satisfactorily. Incorrect operation will result in lack of performance and cause accidents and injuries to personnel.
If the pump becomes damaged during shipment or if parts are missing, WARNING immediately contact EBARA. If a leaking or damaged product is used, an accident resulting in injury or death could occur or the product could become further damaged. Even if leakage occurs, take measures to ensure they will not be directly discharged from the site, as such leakage also wastes resources.
The correct amount of N2 gas is supplied for those two types of purge operation, by adjusting the regulation pressure to the specified value. The N2 gas selector is locating on the right side of the unit, facing the LCD controller and other utility connectors. It is under the outer cover. EBARA CORPORATION PM10U...
It therefore only draws attention that the normal operating values are not adhered to but does not signify that danger is imminent. The pump will continue to operate in this condition. An ALARM signal output is generated and the pump will stop automatically EBARA CORPORATION PM10U...
Be sure to contact EBARA Corporation for details on checking the WARNING and ALARM setting conditions. • Note that the warning indications of the Model ESA500W dry pump are different from the conventional pumps like as UERR, A, AA, AAS series, based on SEMI standard E73.
/ ditches and pump shall be moved on it by two persons with care. Steel Plate If pump should lose its balance when moving and start tripping over, never try to sustain the pump, get away from the pump immediately. EBARA CORPORATION PM10U...
3.4 Detailed Specifications The following tables and figures should be consulted for pump specification, dimension and performance details. Table 3.1 Specification Model Model ESA500W Pumping Speed (50 / 60Hz) 47000 / 50000 L/min Ultimate Pressure 1.0 Pa Gas Inlet ISO160...
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Motor Starter 1 Motor Starter 2 Pressure Gauge N2 Gas Flow Sensor Silencer N2 Gas Regulator Driver Booster Pump Motor 2 (BP) Water Main Pump Motor 1 (MP) Check Valve Cooling Water Flow Sensor Fig. 3.2 System Flow EBARA CORPORATION PM10U...
Four integral mobile support units consisting of a caster and a height-adjustment foot each are provided underneath the pump base. To move the pump, raise the four adjustment feet by turning the holding nuts in the counterclockwise direction. Caster Adjuster (Vibroisolating rubber) Approx 15mm Fig. 4.1 Caster EBARA CORPORATION PM10U...
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[ NOTE ] If the pump is not leveled, shortage of the lubrication oil supply to the bearing may be caused. [ NOTE ] To prevent vibrations and airborne noises, keep horizontal level of pump with the adjustment feet. EBARA CORPORATION PM10U...
The material selected for the water piping of facility side should have a heat resistance so that it can withstand a maximum temperature of at least 70℃ at the operating pressure. EBARA CORPORATION PM10U...
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Make it a rule therefore to stop the cooling water when water droplets can be detected on the outer surface of the pump cooling water piping as this suggests the possibility of dew condensation in the pump. EBARA CORPORATION PM10U...
4.2.4 Ventilation Duct All dry pumps that Ebara supplies shall go through the leakage inspection after assembly regardless of the newly built or overhauled. Yet, in the cases where the user-supplied line connection at the pump exhaust outlet came out or the connection became loose due to long time pump operation while neglecting its maintenance may allow the hazardous gases to leak from the pump module.
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The exhaust noise of the pump will give rise to acoustic resonance inside the pump unit and result in an abnormal noise being generated. CAUTION Never operate the pump without pump cover for safety. EBARA CORPORATION PM10U...
WARNING Electrical wiring shall be carried out only by qualified electricians. CAUTION Do not apply the power supply from the pump's power pack to any other equipment as this will result in malfunctioning of the control units and in pump failure. EBARA CORPORATION PM10U...
Do not modify the plug provided; if it will not fit the outlet, have the proper outlet installed by a qualified electrician. EBARA CORPORATION PM10U...
WARNING:OPEN, Alternate WARNING STATUS (+) ALARM:OPEN, Alternate ALARM STATUS (+) REMOTE:CLOSE REMOTE STATUS (+) − MP START (−) BP START (−) MP START STATUS (−) BP START STATUS (−) WARNING STATUS (−) ALARM STATUS (−) REMOTE STATUS (−) EBARA CORPORATION PM10U...
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RESERVED (−) EMO STATUS (−) PUMP N2 WARNING STATUS (−) RESERVED (−) (−) LOW SPEED CONTROL (−) BACK PRESSURE HIGH WARNING STATUS RESERVED (−) RESERVED (−) ※1 It can change to “Abnormality:OPEN, Alternate“ by DIP SW. setting. EBARA CORPORATION PM10U...
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Table 4.7 CN-Z & CN-Y Signal Contacts Input Pump side Circuit Customer's connection Signal 12VDC 1kΩ 10mA Min. Open Collector Dry Contact Output Pump side Circuit Signal Customer's connection 4VDC-27VDC 100mA Max. Open Collector 4VDC-27VDC EMO 100mA Max. Dry Contact EBARA CORPORATION PM10U...
N2 Solenoid Valve DANGER Power Supply for the options is kept applying voltage when Earth Leakage Breaker (ELB) turns on during the pump is supplied the power. WARNING Do not use the power supply for other purposes. EBARA CORPORATION PM10U...
ENTER For using at DIP switch selection and change hierarchy of screen [LED] B.P. RUN BP running M.P. RUN MP running LOCAL LOCAL mode WARNING WARNING condition ALARM ALARM condition Fig. 6.1 LCD controller EBARA CORPORATION PM10U...
# # # ℃ Motor speed S P E E D WARNING/ALARM $ $ $ $ $ : $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ EBARA CORPORATION PM10U...
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Use the Display Select Switch (△ ▽) to change the display. The WARNINGs/ALARMs that have currently been generated can be displayed with the Display Select Switch. See Fig. 6.2 for the key operation of the pump operation status display. EBARA CORPORATION PM10U...
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PUMP CASING Pump casing temperature ### °C Occurrence date ▽ △ See Table 6.2 for the alarm codes. BP SPEED Motor speed # .# k min-1 Fig. 6.2 Key operation for the pump operation status display screen EBARA CORPORATION PM10U...
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IO comm. error BP comm. error BP current high Code Other error name code code Watch dog timer error Continuous alarm occurred!! Momentary power failure running (*) Momentary power failure stop (*) Start fail alarm/warn exist “*” no displayed. EBARA CORPORATION PM10U...
Sets the DIP switch to ON. Switches the display of the operational mode setting screen. ▽ Sets the DIP switch to OFF. Switches the display of the operational mode setting screen. ENTER Determines the selected setting. See Fig. 6.3 for how to set the operational modes. EBARA CORPORATION PM10U...
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SET POINT Setting the pump N2 flow low warning threshold • N2 FLOW LOW? △ ▽ SET POINT Setting the Back Pressure high warning threshold • BACK PRESSURE? (option) Fig. 6.3 How to set the operational mode EBARA CORPORATION PM10U...
The up and down arrow keys, “ △ ” and “ ▽ , PRG. ” turn On and OFF the DIP switch. The key BZ.OFF switches the selection from 1 to 8. See Section 6.4 for details of the DIP switch. EBARA CORPORATION PM10U...
Use the up and down arrow keys to change the setting value. △ ▽ △ : Increase the setting speed by 0.1 kmin ▽ : Decrease the setting speed by 0.1 kmin Upper limit : 7.0 kmin Lower limit : 1.0 kmin Factory Setting : 3.0 kmin EBARA CORPORATION PM10U...
: Increase the setting value by 0.5 kPa. △ : Decrease the setting value by 0.5 kPa. ▽ Upper limit : 20.0 kPa Lower limit : 5.0 kPa Factory setting : 10.0 kPa WARNING reset value : Set value –2.0 kPa EBARA CORPORATION PM10U...
----- ----- ----- ----- ----- ----- ----- ----- ----- ----- ----- * Optional DIP SW-A. No.1 In case of observing pump running status with RS232C communication port, Data Length can be selected out of 7bits and 8bits. EBARA CORPORATION PM10U...
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DIP SW-A. No. 8 When dip switch-A No. 8 has been set to the REMOTE (Remote Operation) position, it is possible to operate the Booster Pump (BP) by selecting "AUTOMATIC Operation" or "START/STOP in Response to External Signal Input." EBARA CORPORATION PM10U...
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DIP SW-C. No.1 This switch allows you to select "NORMAL OPEN" or "NORMAL CLOSE" for PUMP N2 WARNING output. DIP SW-C. No.3 This switch allows you to select "NORMAL OPEN" or "NORMAL CLOSE" for Backpressure WARNING output. EBARA CORPORATION PM10U...
* indicate the dip switch number (1 to 8) currently you are setting. Fig 6.5 DIP Switch [NOTE] Duration of pump operation, dip switches, except A-3 (BUZZER) and B-8 (LCD initialize), can not be used for parameter setting. EBARA CORPORATION PM10U...
The one with its LED START/STOP Allowed “LOCAL” lit on is allowed. When you use two controllers, disconnect the one which you will not use for the operation from the pump once. Then, attach it again. EBARA CORPORATION PM10U...
CAUTION Unless a sufficient supply of N2 gas is maintained, serious problems will occur such as oil back flow or pump corrosion and accretion of reaction by-products. EBARA CORPORATION PM10U...
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(8) When the pump exhaust pipe is equipped with a valve, open this valve before starting the pump. CAUTION Problems will occur when the pump is operated with the valve closed as the exhaust pipe will be pressurized. EBARA CORPORATION PM10U...
Do not exhaust the process gases until at least 30 minutes after the pump has been started. The pump casing temperature will stabilize after about 4 hours and it is recommended not to start exhausting the process gases earlier than this. EBARA CORPORATION PM10U...
When the START button is pressed, "STARTFAIL" will appear on the display. b) STOP Press the STOP button on the controller. The MP and BP will stop simultaneously. The RUN lamp goes out and the display gives a power reading of 0.0A. EBARA CORPORATION PM10U...
[ NOTE ] The pump will not start when a WARNING/ALARM has been generated. When a START signal is entered, "STARTFAIL" will appear on the display. b) STOP Interrupt the external MP start signal and the pump will stop. EBARA CORPORATION PM10U...
When a START signal is entered, "STARTFAIL" will appear on the display. BP can be started/stopped by the external signal when the DIPswitch set accordingly. b) STOP Interrupt the external MP start command and the pump will stop. *Please refer to the COMMUNICATION SPCIFICATIONS in detail. EBARA CORPORATION PM10U...
Close N2 port with blank off plug. If the pump has already operated with process gases, purge the residual gases with N2 gas after stopping the pump operation. Then, conduct maintenance. EBARA CORPORATION PM10U...
"RESET" signal is entered. After you have taken the remedial action, press the "RESET" button on the controller or enter the RESET signal from the control signal connector to reset the WARNING. EBARA CORPORATION PM10U...
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If any abnormal symptoms other than those displayed on the LCD controller appear, take action in accordance with the instruction of Section 10. "Troubleshooting". When the "BZ.OFF" button is pressed in the BUZZER Enable mode, the buzzer will stop even during an warning status. EBARA CORPORATION PM10U...
The personnel protective equipment must include at least gloves, safety goggles, and a gas mask. Be sure to following the instructions below when carrying out maintenance work on the vacuum and exhaust piping of the pump. EBARA CORPORATION PM10U...
Follow the steps below to supply oil. (1) Stop the pump and remove the outer side cover on the pump. (See Fig. 8.1) Fig. 8.1 How to remove pump covers EBARA CORPORATION PM10U...
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Oil filler inlet Oil filler inlet Oil level gauge Oil level gauge Oil drain hole Fig. 8.2 Oil filler port, oil level gauge, and oil drain port positions (7) Please check the air leak after supplying lubricant oil. EBARA CORPORATION PM10U...
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(Except Booster pump gear side.) CAUTION When the lubrication oil level is lower than the lower limit line, serious failure may be caused. If you find out the shortage, add the oil immediately. EBARA CORPORATION PM10U...
Lubricant oil See section 8.4. Material Safety Data Sheet. CPU board. Refer to Appendix 3 for Material Lithium battery (No necessary to replace at Safety Data Sheet. usual maintenance.) O-ring Connection of vacuum line Usual industrial waste. EBARA CORPORATION PM10U...
(1) Fill all necessary items in a form shown in Appendix 5 and fax it in advance to Ebara Service Center or one of the agents listed in Section 11 of this manual. Ask Ebara service center for latest form. The original copy must accompany the pump you send.
EBARA Corporation before you return the pump. Refer to Appendix 4 and 5 for the format required when customer returns their pump to Ebara service center for overhaul or rebuild CAUTION...
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If not, oil leakage will occur. 60 deg or less Fig. 9.1 Slinging the Pump When options such as an interface box are attached to the pump, be careful to avoid damage due to contact by the wire rope. EBARA CORPORATION PM10U...
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To avoid dangers potentially encountered during pump overhauls, follow instructions shown in Section 8.7, Appendix 4 and 5 to send your pump to an Ebara-designated factory for overhaul or repair. EBARA CORPORATION PM10U...
Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
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Leak from vacuum piping. Check piping. Accumulation of by-products in pumps. Replace or overhaul pump. **MEMORY ERROR** is None Need “Countermeasure against displayed on LCD after electric Noise” to pump. activating ELB or changing the dip switch setting EBARA CORPORATION PM10U...
Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
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OIL LEVEL LOW (See Fig.8.1) After you have taken the remedial actions above, reset the pump. If the problem that has caused the WARNING signal still remains, the WARNING display will appear again even after you have reset. EBARA CORPORATION PM10U...
Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa into the purge port and do check. EBARA CORPORATION PM10U...
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Reduce the inflow gas amount. Can not restart Rotor makes contact. (Accumulation of Replace or overhaul by-products) pump. (Substance plunge) Instrument failure Replace instrument. ALARM :MP MP motor current Instruments are in failure. Replace instruments. NO CURRENT value is 0. EBARA CORPORATION PM10U...
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During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA CORPORATION PM10U...
During REMOTE operation carry out the above procedures after you have turned off the external start signal. When the external start signal remains on in the ALTERNATE mode, the pump will start immediately when the RESET signal is applied. EBARA CORPORATION PM10U...