Table of Contents
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DRY VACUUM PUMP
MODEL EV-PA 250
MODEL EV-PA 500
Read and understand this INSTRUCTION MANUAL thoroughly before using
this equipment.
Keep this INSTRUCTION MANUAL on hand for future reference.
To Facility and Tool Manufactures:
Distribute this Instruction Manual to all end-user personnel actually operating
this equipment.
Model EV-PA in this document is model code of Ebara.
2019/04/04
2019/04/19
2019/05/21
PM10U
INSTRUCTION MANUAL
!
CAUTION
Date
Initial Release
Drawing update
Front page module name
Contents
ISSUED BY PRECISION MACHINERY COMPANY
Doc.No.7312-Z94024 Rev.2
EBARA
CORPORATION
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Table of Contents
Related Manuals for EBARA EV-PA 250
Summary of Contents for EBARA EV-PA 250
- Page 1 Keep this INSTRUCTION MANUAL on hand for future reference. To Facility and Tool Manufactures: Distribute this Instruction Manual to all end-user personnel actually operating this equipment. Model EV-PA in this document is model code of Ebara. Date Contents 2019/04/04 Initial Release...
- Page 2 Do not reproduce or reprint any portion of this manual without permission. Manufacturer reserves the right to discontinue or change any specifications or Designs without notice and without incurring obligations. EV-PA in this instruction manual is our model code. All rights reserved, copyright EBARA Corporation. EBARA CORPORATION PM10U...
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Page 3: Environmental Basic Policies
We will widely publicize these basic policies to regional societies and the general public and work to make Ebara's position on the environment clear to society in general. EBARA... -
Page 4: Foreword
EBARA EV-PA series DRY VACUUM PUMP by careful study of this manual. If any questions arise regarding this manual, please direct them to EBARA or your dealer. Your questions will be promptly answered and your suggestion may be considered for incorporation into our future products. -
Page 5: Limited Warranty
(2) If the trouble is caused by operating in the manner not described in the instruction manual or using under special condition. (3) If the trouble is caused by repair or remodeling of the pump by other than Ebara or authorization suppliers by Ebara. -
Page 6: Safty Notice
: is used to call attention or to emphasize essential information. Precautions necessary for safe use of the EBARA EV-PA series DRY VACUUM PUMP are detailed in this instruction manual, while important items concerning precautions for handling EBARA EV-PA series DRY VACUUM PUMPare listed below. - Page 7 · Do not insert any part of body to ventilation outlet. Moving parts of the cooling fan can crash and cut. · Do not alter the pump member nor change any parts without the EBARA’s consent or approval. EBARA CORPORATION...
- Page 8 · Check the pump according to “8. Troubleshooting” before stopping suddenly. This pump doesn’t stop by signal “WARNING”. But signal “ALARM” or serious trouble occurs in a pump when pump driving is continued. EBARA CORPORATION PM10U...
- Page 9 · Do not supply a power till you confirm pump setting and safety complete when you use an “AUTO MODE”.. · With the “AUTO MODE”, the pump starts driving after warm-up completion automatically (When a pump is not abnormal). EBARA CORPORATION PM10U...
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Page 10: Safty Warning Labels
Turn power off and lockout before servicing. Hazardous voltage may shock, burn, or cause death. 3. Heavy object warning Do not lift and move without assistance. Heavy object may result in severe injury. 4. Electric charge mark EBARA CORPORATION PM10U... - Page 11 EBARA CORPORATION PM10U...
- Page 12 EBARA CORPORATION PM10U...
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Page 13: Environmental Concerns
To dispose the standard consumption parts, follow effective laws and ordinances applicable in the area where the unit is installed. (3) To dispose the unit, follow effective laws and ordinances applicable in the area where the unit is installed. EBARA CORPORATION PM10U... -
Page 14: Table Of Contents
4. Control Panel ......................... 31 4.1 Control panel Outline ....................31 4.2 LCD Indication ......................32 5. Operation ......................... 36 5.1 Before Starting ......................36 5.2 START/STOP ......................37 5.3 Operation when momentarily power failure happens ........37 EBARA CORPORATION PM10U... - Page 15 6.3 Instruction for cleaning ................... 39 6.4 Repair and Serving ....................39 7. Storage / Disposal ....................... 40 7.1 Storage ........................40 7.2 Disposal ........................40 8. Troubleshooting ......................41 8.1 Troubleshooting (1) Basic trouble ..................... 41 EBARA CORPORATION PM10U...
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Page 16: Acceptance Check
Humidity 80% or less Note Notify EBARA without delay when damage is discovered or when components are missing. Do not use when a leak is present as this will result in accident. Note Placed the pump in an upright position. Do not stack as packing. When the pump is overturned, this will result in accident. -
Page 17: Product Description
All WARNING and ALARM signals are displayed on the front panel. For remote operation and monitoring, the signals are available as individual and group output. Contact EBARA for details on checking the WARNING and ALARM setting condition. EBARA CORPORATION... -
Page 18: Detailed Specifications
The ability for moisture exhaust in the gas ballast is 10g/hr at the maximum. *** Measured on the following condision (1) Pump is operating under ultimate pressure. (no gas ballast) (2) Measured at 1m distance from cover. EBARA CORPORATION PM10U... - Page 19 EV-PA Serise pump overview Inlet Ballast Port Control Panel Control Connector Fixture (Option) Circuit Protector （CP） Ventilation Power Connector Inlet Carrying Fixture (Option) Handle Outlet Ventilation Outlet EBARA CORPORATION PM10U...
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Page 20: Outline Drawing
2.3.2 Outline Drawing EV-PA250 EBARA CORPORATION PM10U... - Page 21 EV-PA500 EBARA CORPORATION PM10U...
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Page 22: Performance Curve
2.3.3 Performance Curve 1000 1000 10000 100000 Inlet Pressure（Pa) Fig 2.1 EV-PA250 Performance Curve (Dashed line: Gas ballast setting) 1000 1000 10000 100000 Inlet Pressure（Pa) Fig 2.2 EV-PA500 Performance Curve (Dashed line: Gas ballast setting) EBARA CORPORATION PM10U... -
Page 23: System Flow
2.3.4 System Flow Gas ballast Inlet Power Circuit Protector Control Control Circuit Connector Motor Booster Pump Motor (BP) Driver Main Pump Motor (MP) Check Valve Outlet Fig 2.3 System Flow EBARA CORPORATION PM10U... -
Page 24: Installation
(2) Rubber feet of five each are attaches under the pump base. To fix the pump, install the pump on flat surface. Note To fix the pump, the rubber feet of five each attaches. If the pump is not stable, vibration and noise of the pump may be increased. EBARA CORPORATION PM10U... - Page 25 Loaded wight of each foot(N) Model (kg) Front Center Rear EV-PA250 26.5 31.4 36.3 EV-PA500 41.2 41.2 41.2 Seimic brackets x2 Rubber feet Rubber feet (Rear side) (Front side) Rubber foot (Center) the seimic bracket（EV-PA250/500） Material: Carbon Steel EBARA CORPORATION PM10U...
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Page 26: Piping
When the gas ballast is supplied with pressurized gas, install regulator at the gas ballast port which is the connection type G1/8 Female. And adjust the supply pressure to 0.05MPa (Guage) pressure or less to set the gas ballast flow rate to 8.4Pam3/s. EBARA CORPORATION PM10U... -
Page 27: Electrical Wiring
Connect the pump to a suitable earth point. Use the power cable with ground. Insert the power cable in the grounding power outlet. WARNING Do not use the power cable adapter. EBARA CORPORATION PM10U... - Page 28 Power outlet terminal: NON PB No plug Power outlet Pump side Plug(male) Plug(female) Fig.3.1 Sketch of Power cable（NR VM602-VM0291 3M NON PB） If you have any requirement about the power cable, please contact EBARA or your dealer. EBARA CORPORATION PM10U...
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Page 29: Control Signal Wiring
ALARM; OPEN, Alternate REMOTE STATUS (+) REMOTE: CLOSE − PUMP START (−) RESET (−) PUMP START/STOP STATUS (−) RESERVED (−) WARNING STATUS (−) ALARM STATUS (−) REMOTE STATUS (−) PUMP START/STOP, RESET request continuing signal input over 300ms. EBARA CORPORATION PM10U... - Page 30 5VDC power for input signals. Note Wire all signals with the correct polarity (SIG./COM.). Note When output signals energize an inductive load such as a relay, insert a diode (100V. 1A class) to limit the back electromotive force during de-energization. EBARA CORPORATION PM10U...
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Page 31: Control Panel
Pump Stop ▲ ▼ LCD Indication Change RESET WARNING and ALARM Reset ENTER Pump setting selection [LED] Pump running (green) WARNING WARNING condition (orange) ALARM ALARM condition (red) [LCD] For indication operation time, pump imformation and WARNING/ALARM status. EBARA CORPORATION PM10U... -
Page 32: Lcd Indication
Two LCD backlight modes are available: ”AUTO “ and “CONST ”. In auto mode the backlight of display will turn off automatically. During WARNING/ALARM has occurred, the backlight light up. The pump model is set at the time of shipment from the factory. EBARA CORPORATION PM10U... - Page 33 EBARA CORPORATION PM10U...
- Page 34 LCD BL LCD BL? AUTO EBARA CORPORATION PM10U...
- Page 35 FAN recovery EEP WAR EEPROM error PUMP RUN CP ON again (*2) (*2) When EEP WAR occurs, the operation time is not saved to EEPROM. The pump will not start when a WARNING has been generated before starting. EBARA CORPORATION PM10U...
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Page 36: Operation
(4) Open the valve before starting the pump when the pump exhaust pipe is equipped with a valve. CAUTION Problems will occur when the pump is operated with the valve closed as the exhaust pipe will be pressurized. EBARA CORPORATION PM10U... -
Page 37: Start/Stop
1 second. Then LCD display “PWR FAIL”. In the momentarily power failure condition, the pump rotor is driven by inertia due to interception of power supply. Thus, pumping performance may be decreased than guaranteed specification. EBARA CORPORATION PM10U... -
Page 38: Maintenance And Inspection
Do not start the pump when a WARNING/ALARM has been generated. After you have taken the remedial actions, reset the pump. If any abnormal symptoms other than those displayed on the LCD controller appear, take action in accordance with the instruction of Section 8. "Troubleshooting". EBARA CORPORATION PM10U... -
Page 39: Maintenance Parts List
If any abnormal symptoms other than those displayed on the LCD controller appear, take action in accordance with the instruction of Section 8. "Troubleshooting". If trouble occurs, to order repairs or servicing. Please contact EBARA CORPORATION or an authorized Agent/Distributor, and provide the information on the nameplate and details of the problem. -
Page 40: Storage / Disposal
(3) Store the pump in a dry and clean place. Temperatur: 5℃ to 40°C Humidity : 80% or less 7.2 Disposal To dispose the unit, follow effective laws and ordinances applicable in the area where the unit is installed. EBARA CORPORATION PM10U... -
Page 41: Troubleshooting
The pump unit and the inlet piping and exhaust piping will remain at a high temperature during operation and for a short time after the pump has stopped. CAUTION Check for leaks after you have installed and maintainance the pump. EBARA CORPORATION PM10U... - Page 42 LIVINGSTONE, WEST LOTHIAN, EH54 9DE, U.K. PHONE:44-1506-460232 URL: FAX:44-1506-460222 http://www.ebara.com.sg/index.php?option=com_frontpage&Itemid=1 CHINA Service Locations: http://www.ebara-pm.eu/about-us/locations.html SHANGHAI EBARA PRECISION MACHINERY CO., LTD. KOREA ZHANGJIANG HIGH-TECHNIC PARK, NO.76 LANE 887, EBARA PRECISION MACHINERY KOREA INC. ZUCHONGZHI ROAD, SHANGHAI, 201203, CHINA PHONE:86-21-5131-7008 HEADQUARTERS FAX:86-21-5131-7048...
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- Page 47 MATERIAL SAFETY DATA SHEET MSDS No. EW050044 Revised Date: 2007/10/12 050-00446, 050-00463, 050-06661, 051-00459, 051-07517, 052-00467, 052-06925, 052-07221, 053-00453, 053-06531, 054-00461, 054-00466, CODE: 054-07220, 054-07225, 055-00457, 055-06895, 055-07515, 056-06663, 057-00451, 057-00456, 058-00469 IDENTITY Ethanol(99.5) 1. IDENTIFICATION OF THE SUBSTANCE OR MIXTURE AND OF THE SUPPLIER PRODUCT IDENTIFIER : Ethanol(99.5) MANUFACTURER : Wako Pure Chemical Industries, Ltd.
- Page 48 EINECS No. : 200-578-6 EC INDEX NUMBER : 603-002-00-5 4. FIRST AID MEASURES GENERAL ADVICE : Wash off immediately with soap and plenty of water. In the case of respirable dust and/or fumes, use self-contained breathing apparatus and dust impervious protective suit. Use personal protective equipment. INHALATION : Move victim to fresh air.
- Page 49 ACETONE : Miscible PARTITION COEFFICIENT : -0.32 AUTOIGNITION TEMPERATURE : 371 - 427 C= 700 - 801 DECOMPOSITION TEMPERATURE : Not available 10. STABILITY AND REACTIVITY CHEMICAL STABILITY : Will not occur. CONDITIONS TO AVOID : Sunlight, heat, open flames, high temperature, sparks, static electrical charge, other ignition sources, moisture INCOMPATIBILE MATERIALS : Oxidizers, peroxides, acids, acid chlorides, acid anhydrides, alkali metals, ammonia...
- Page 50 List , New Jers. RTK Haz. Subst. List , Penn. Haz. Subst. List , Canad. WHMIS IDL 0.1% conc. EPA : CERCLA RQ= Not listed EPCRA TPQ= Not listed EPA FIFRA 1998 STATUS OF PESTICIDES: Red Completed OSHA : TQ= Not listed NFPA : HR= health-0 , flam.-3 , react.-0 HMIS : HR= health-1 , flam.-3 , react.-0 16.