EBARA ESA70W Manuals

EBARA ESA70W Manuals

Manuals and User Guides for EBARA ESA70W. We have 1 EBARA ESA70W manual available for free PDF download: Instruction Manual

EBARA ESA70W Instruction Manual

EBARA ESA70W Instruction Manual (82 pages)

Multi-Stage Dry Vacuum Pump

Brand: EBARA | Category: Water Pump | Size: 0.75 MB

Table of Contents

Environmental Basic Policies

3
Safety Information

4
Important Prior Warnings

5
Standard Limited Warranty

11
- Table of Contents
  12
1 Foreword

14
2 Introduction

14
- Environmental Concerns
  15
3 Product Description

16
- Outline
  16
  - Pump Module
    16
  - N2 Gas
    16
  - Cooling Water
    17
  - Exhaust
    17
- Control System
  17
  - Warning
    17
  - Operation Status Control
    18
- The Way of Pump Moving
  18
  - Preparation
    18
  - Moving Method
    19
- Detailed Specifications
  20
4 Installation

25
- Movement and Fixation
  25
  - Location
    25
  - Caster and Adjustment Foot
    25
- Piping
  27
  - Vacuum and Exhaust Piping
    27
  - Cooling Water Piping
    28
  - N2 Gas Piping
    29
  - Ventilation Duct
    30
- Electrical Wiring
  31
  - Grounding
    31
  - Power Supply Wiring
    32
  - Control Signal Wiring
    33
5 Power Supply for the Options

36
6 LCD Controller

37
7 Operation

55
- Before Starting
  55
- Start/Stop
  58
- LOCAL (Pump Side) Start/Stop
  59
- REMOTE Start/Stop
  60
- Communication Start/Stop
  61
8 Maintenance and Inspection

62
- Internal Energies
  62
- Power Source
  62
- Cooling Water
  62
- Nitrogen Gas
  62
- Routine Inspection
  63
- Vacuum and Exhaust Piping
  65
- Lubricant Oil
  66
- Spare (Maintenance) Parts List
  70
- List of Wastes During Maintenance
  70
- Overhaul
  71
9 Disconnection and Transportation

72
10 Troubleshooting

74

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