N 2 Gas Piping; Ventilation Duct - EBARA A70W Instruction Manual

4.2.3 N Gas Piping
2
Cut tube at right angles and make the end-face perfectly smooth. Then connect the tube to
the tube fitting assembly of the N
the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand. Then use a
tool to tighten the nut an additional 1¼ turns.
To reconnect the tube again after subsequent removal, install the tube already fitted to the
ferrule and retighten the retaining nut slightly (about ¼ turn) beyond hand tight.
B ody

4.2.4 Ventilation Duct

Exhaust hot air from the pump enclosure through the ventilating duct port in the top cover.
Without proper ventilation, the temperature inside the cover may rise, causing an ALARM.
The pump does not have a gas leak detector. For hazardous gases, EBARA recommends
installing a gas leak detector, interlocked to gas flow, in the ventilation duct piping.
Use an exhaust duct material that resists corrosion from the gas(es) pumped.
CAUTION
[NOTE]
gas purge port. The tube will push fit onto the shoulder of
2
Front B ack
Ferrul e Ferrul e
Figure 4.3 Tube Fitting Assembly
For safety, ventilate through the enclosure exhaust duct when the
pump application is toxic and/or flammable gases.
combine the ventilation duct with the pump exhaust piping.
Even when pumping process gases that are not toxic or
flammable, do not combine the ventilation duct with the pump
exhaust piping. The exhaust noise of the pump may cause
acoustic resonance inside the pump unit and result in abnormal
noise.
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R otati on
EBARA Corporation
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