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[ NOTE ]
[ NOTE ]
DIP SW-A. No. 8
DIP SW-B. No.4
DIP SW-B. No.6
DIP SW-B. No.7 Selects the detection method for phase loss in the power
DIP SW-B. No.8
DIP SW-C. No.1
DIP SW-C. No.3
DIP SW-C. No.6
DIP SW-C. No.7
PM10U
The N2 gas selector valve is positioned on the front panel at the right
when viewing facing the pump front panel (operating panel).
It takes ten odd seconds until the flow has stabilized after you have
operated the N2 gas selector valve.
When dip switch-A No. 8 has been set to the REMOTE
(Remote Operation) position, it is possible to operate the
Booster Pump (BP) by selecting "AUTOMATIC Operation"
or "START/STOP in Response to External Signal Input."
Controls N2 supply to the pump with a valve attached to the
N2 piping in the pump unit. This is optional.
Activate or inactive the special interface for ESA.
･ Set this to OFF to activate the interface (optional).
･ Set this to ON to inactivate the interface (default).
source.
Locks or unlocks the currently selected operation status
display, which usually returns to the power display in 60
seconds.
This switch allows you to select "NORMAL OPEN" or
"NORMAL CLOSE" for PUMP N2 WARNING output.
This switch allows you to select "NORMAL OPEN" or
"NORMAL CLOSE" for Backpressure WARNING output.
This switch allows you to select enable or disable the pump
valve control.
This switch allows you to select enable or disable the output
of pump valve control status.
P.43
EBARA
CORPORATION
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Troubleshooting
