N2 Gas Piping; Ventilation Duct - EBARA ESA500W Instruction Manual

P.16

4.2.3 N2 Gas Piping

Cut tube at right angles and make the end-face perfectly smooth. Then connect
the tube to the tube fitting assembly of the N2 gas purge port. The tube is a
push-fit onto the shoulder of the tube fitting assembly.
Secure the tube fitting assembly properly and tighten the retaining nut by hand.
After this, use a tool to tighten the nut further by 1 + 1/4 turns.
To connect the tube again after this, install the tube already fitted to the ferrule
and re-tighten the retaining nut slightly after the initial tightening (generally,
tighten by a further quarter turn after tightening by hand).
CAUTION For safety, be sure to use N2 gas which purity is more than 99.999%.

4.2.4 Ventilation Duct

All dry pumps that Ebara supplies shall go through the leakage inspection after
assembly regardless of the newly built or overhauled. Yet, in the cases where
the user-supplied line connection at the pump exhaust outlet came out or the
connection became loose due to long time pump operation while neglecting its
maintenance may allow the hazardous gases to leak from the pump module.
This pump is designed such that the process gases will not leak to environment
to the level harmful to human if the unit has been properly ventilated.
Proper ventilation is necessary not only to prevent the hazardous gases to leak
but also release heat generated and accumulated in the pump module through
the pump operation. Without proper ventilation, the temperature inside the cover
will continue to rise until an ALARM is generated. This will result in serious
problems.
PM10U
Front Back
Body
Ferrule Ferrule
Fig. 4.3 Tube Fitting Assembly
Impurities of N2 gas may cause an accident when the pump is used
for exhausting toxic and/or inflamable gases.
1 + 1/4
Nut
Rotation
EBARA
CORPORATION