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EBARA ESA200W Instruction Manual page 75

Multi-stage dry vacuum pump

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P.56
Even when the cause of the WARNING/ALARM signal has been removed the
signal will be maintained until the "RESET" signal is entered. After you have
taken the remedial action, press the "RESET" button on the controller or enter
the RESET signal from the control signal connector to reset the WARNING.
CAUTION
CAUTION When a ALARM signal has been generated in the REMOTE
If any abnormal symptoms other than those displayed on the LCD controller
appear, take action in accordance with the instruction of Section 10.
"Troubleshooting".
When the "BZ.OFF" button is pressed in the BUZZER Enable mode, the buzzer
will stop even during an warning status.
PM10U
The pump will not stop when an WARNING signal is generated.
When pump operation is continued in this condition a ALARM
signal will be generated or a serious breakdown will occur. Be
sure therefore to check the pump in accordance with the
instructions of Section 10. "Troubleshooting" after the process
plant has completed 1 cycle.
operating mode, do not start the maintenance tasks until you
have interrupted the external start signal. When the external
ALTERNATE start signal input is maintained, the pump will
start while the ALARM is being reset.
EBARA
CORPORATION

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