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P.72
ALARM:
BP DRIVER ###
ALARM:
PHASE ERROR
ALARM:STARTFAIL
ALARM/WARN EXIST
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the ALARM signal still remains, the ALARM display will appear
again even after you have reset.
During REMOTE operation carry out the above procedures after you have
turned off the external start signal.
When the external start signal remains on in the ALTERNATE mode, the pump
will start immediately when the RESET signal is applied.
PM10U
BP Motor driver
Insufficient ventilation
protection
Pump back press. rises.
Increase of the gas load.
Can not restart
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Cooling water flow rate is
reduced.
Motor driver has broken
down.
Open phase
Instrument failure
Incorrect wiring
Start fault
Starting during
WARNING/ALARM status
Instrument failure
Ventilate sufficiently.
Check exhaust pipe.
Reduce the inflow gas
amount.
Replace or overhaul
pump.
Cool pump thoroughly
and reset.
Replace motor driver.
Replace instrument.
Check power supply
Make sure that all
starting conditions are
met.
Replace instrument.
EBARA
CORPORATION
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Troubleshooting
