Vacuum Piping; Water Piping - EBARA 80?25 Installation Operation & Maintenance

EBARA Multi-Stage Dry Vacuum Pumps
CAUTION
!
Be sure to use the outer most fill plugs. On all pump models, a second plug is
located on the inner flange. This is not a fill plug and should not be removed to
add lubricating fluid to the pump.
• Fill the lubricating fluid reservoirs to the upper line on the motor sight glass
(approximately .2 liters per reservoir). Do not overfill.
The lubricating fluid reservoirs are located at both ends of each pump. The lubricating
fluid fill plugs are located on the top of the gear case and on the motor mounting flange.
NOTICE
!
Recommended lubricating fluids for Ebara pumps are Krytox 1525, Fomblin
Y-LVAC 25/6, Barrierta J100, or equivalent fluids.
3.2

Vacuum Piping

CAUTION
!
Because of the pump's tight internal running clearances, care must be taken to
prevent any foreign particles from entering the pump.
• Always cover the inlet of the pump when it is not connected to the vacuum
piping. This is to prevent the entry of any foreign materials.
• Completely remove any welding scale or rust from the inside of all vacuum
piping.
• Make sure that no particulate matter is present inside the vacuum vessel.
• Properly support all vacuum piping. This minimizes loads on the pump inlet and
outlet flanges.
• Use of flexible bellows between the pump and the tool pump line will further
minimize the transmission of vibrations.
• Use of a screen filter before the pump inlet is recommended. Contact your
Ebara representative for more information.
3.3

Water Piping

A constant supply of water is required to cool the motors and pump module. If the
cooling water is restricted for any length of time with the pump running, the pump could
overheat and seize. All pumps are designed to shut down if the cooling water flow
drops below 3-4 lpm (after a 3-minute time delay).
To confirm the water flow shut-off setting:
930601-P
Installation
13